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FLAT EXCIMER
- Are there any classifications like lasers?
- Is customization possible?
- What will I need to operate an excimer lamp light source besides the light source itself?
- Is it necessary to enclose the irradiated atmosphere?
- Is an ozone exhaust duct required for the irradiation equipment?
- What is the appropriate irradiation distance?
- Is nitrogen (N2) purge required on using an excimer lamp light source?
- Are there any restrictions on target materials?
- Are there thermal effects on the object irradiated with vacuum UV light?
- How long does the processing effect from surface modification last?
- How should the light intensity be managed?
- Is it possible to evaluate the light source?
- Are there any precautions for use?
- Are there any standards for the use of ozone?
Are there any classifications like lasers?
Excimer lamp light sources do not belong to the laser class, but are classified under IEC62471 “Photobiological safety of lamps and lamp systems”, and a risk group assessment is performed for each model.
Is customization possible?
Please feel free to contact us to discuss your needs based on the specifications and quantity.
What will I need to operate an excimer lamp light source besides the light source itself?
The items indicated on the connection diagram are required.
EX-86U
EX-mini
Is it necessary to enclose the irradiated atmosphere?
For EX-86U, irradiation equipment is required to prevent UV leakage and to exhaust ozone.
We recommend that the irradiation equipment be made of SUS or aluminum, which are less susceptible to deterioration by vacuum UV light.
Is an ozone exhaust duct required for the irradiation equipment?
An ozone exhaust duct is required.
However, for the EX-mini, the need for an exhaust duct can be eliminated by using the optional ozone decomposition unit E12685, which has cooling and ozone decomposition functions.
The required exhaust level is not specified because it depends on the volume and airtightness of the irradiation equipment. The customer should adjust the exhaust volume so that the irradiation atmosphere has negative pressure.
EX-86U
What is the appropriate irradiation distance?
The irradiation distance should be as short as possible.
Since vacuum UV light has a high attenuation rate in the atmosphere, we recommend an irradiation distance of 1 mm to 2 mm. The farther the irradiation distance, the longer the irradiation time until the desired effect is obtained. Depending on the material, the irradiation time may be several tens of seconds or longer.
Is nitrogen (N2) purge required on using an excimer lamp light source?
Our excimer lamp light source essentially does not require nitrogen (N2) purges.
However, if the irradiation distance is more than 5 mm, we recommend nitrogen purging be performed.
Are there any restrictions on target materials?
Regarding surface modification, a certain effect can be expected regardless of the material.
Dry cleaning can decompose and remove organic materials but cannot remove inorganic materials.
If vacuum UV light is irradiated on materials containing halogens, such as fluororesins or chlorine-based resins, the decomposition products may adversely affect the excimer lamp light source, so do not irradiate materials containing halogens with vacuum UV light.
Are there thermal effects on the object irradiated with vacuum UV light?
There is almost no thermal effect on the irradiated object.
When the surface temperature of a polyethylene (PE) plate irradiated at an irradiation distance of 2 mm was measured with a thermocouple, the result was 36 ℃ in 1 min and 58 ℃ in 10 min.
How long does the processing effect from surface modification last?
While it varies depending on the material, the processing effect tends to decrease over time.
In most cases, the processing effect lasts for a few minutes, so we recommend moving on to the next process immediately after modification.
How should the light intensity be managed?
We recommend managing light intensity with our UV power meter.
You can also use your own calibrated UV power meter to manage light intensity.
Is it possible to evaluate the light source?
We have a demo unit available, so please feel free to contact us.
Are there any precautions for use?
Since strong UV rays that are harmful to eyes and skin are emitted, be sure to wear protective equipment when handling the product.
When installing the equipment, design it to prevent the leakage of UV rays. In addition, since ozone generated in the irradiation equipment cannot be removed with the cooling exhaust duct of the lamp house, please install a separate ozone exhaust duct.
Are there any standards for the use of ozone?
According to the standard recommended by the Japan Society for Occupational Health, the ozone concentration should be 0.1 ppm or less (8 hours a day, 5 days a week).
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