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VUV light source unit
L10706
The L10706 is a proximity irradiation model equipped with a stainless steel flexible tube and unique cooling mechanism specifically designed for installation into vacuum chambers.
Its compact design and easy routing of the flexible tube within equipment make the L10706 ideal for applications requiring pinpoint removal of electrostatic charges.
Specifications
| Parameter | Description | Unit | ||
|---|---|---|---|---|
| Window material | MgF2 | － | ||
| Spectral distribution | 115 to 400 | nm | ||
| Preheating time | 25 ±5 | s | ||
| Light output stability | Fluctuation (p-p) | Max. | 0.05 | % |
| Drift | Max. | ±0.3 | %/h | |
| Guaranteed lamp life (*1) | 1000 | h | ||
| Replacement lamp | L10706D | － | ||
| Vacuum flange | IDF70 | － | ||
| Sealing method | Cu gasket | － | ||
| Leakage amount | 1 x 10-10 Pa m3/s (*2) | － | ||
| Input voltage (AC) | 100 V to 240 V, single phase 50 Hz / 60 Hz (*3) | － | ||
| Power consumption | Max. | 200 | VA | |
| Light source unit cooling method | Forced air cooling by high-pressure air (*4) | － | ||
| Operating temperature range | +10 to +35 | ℃ | ||
| Storage temperature range | -10 to +60 | ℃ | ||
| Operating humidity range | Below 80 % (no condensation) | － | ||
| Storage humidity range | Below 80 % (no condensation) | － | ||
| External control | Irradiation control, irradiation signal, various error signals | － | ||
*1: The life end is defined as the time when light output at 230 nm falls below 50 % of its initial value or when light output fluctuation exceeds the maximum specification value.
Note that light output attenuation is highly dependent on the condition of the vacuum equipment.
*2: Result measured with helium leak detector.
*3: Input to the DC jack on the L10706 (power supply unit) should be 12 V DC (10.8 V to 13.2 V DC and less than 17 W).
*4: Using a high-pressure tube, supply compressed air at a flow rate of 20 to 30 liters per minute.
Characteristics
Neutralization performance (Typ.)
Neutralization time vs. distance
Neutralization time vs. vacuum level
Directivity (light distribution) (Typ.)
Light irradiation range (Typ.)
Installation example
Dimensional outlines (Unit: mm)
Light source unit
Power supply unit (Weight: Approx. 120 g)
- Confirmation
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