VUV light source unit


The L10706 is a proximity irradiation model equipped with a stainless steel flexible tube and unique cooling mechanism specifically designed for installation into vacuum chambers.

Its compact design and easy routing of the flexible tube within equipment make the L10706 ideal for applications requiring pinpoint removal of electrostatic charges.


Parameter Description Unit
Window material MgF2
Spectral distribution 115 to 400 nm
Preheating time 25 ±5 s
Light output stability Fluctuation (p-p) Max. 0.05 %
Drift Max. ±0.3 %/h
Guaranteed lamp life (*1) 1000 h
Replacement lamp L10706D
Vacuum flange IDF70
Sealing method Cu gasket
Leakage amount 1 x 10-10 Pa m3/s (*2)
Input voltage (AC) 100 V to 240 V, single phase 50 Hz / 60 Hz (*3)
Power consumption Max. 200 VA
Light source unit cooling method Forced air cooling by high-pressure air (*4)
Operating temperature range +10 to +35
Storage temperature range -10 to +60
Operating humidity range Below 80 % (no condensation)
Storage humidity range Below 80 % (no condensation)
External control Irradiation control, irradiation signal, various error signals

*1: The life end is defined as the time when light output at 230 nm falls below 50 % of its initial value or when light output fluctuation exceeds the maximum specification value.
     Note that light output attenuation is highly dependent on the condition of the vacuum equipment.

*2: Result measured with helium leak detector.

*3: Input to the DC jack on the L10706 (power supply unit) should be 12 V DC (10.8 V to 13.2 V DC and less than 17 W).

*4: Using a high-pressure tube, supply compressed air at a flow rate of 20 to 30 liters per minute.


Neutralization performance (Typ.)

Neutralization time vs. distance

Neutralization time vs. vacuum level

Directivity (light distribution) (Typ.)

Light irradiation range (Typ.)

Installation example

Dimensional outlines (Unit: mm)

Light source unit

Power supply unit (Weight: Approx. 120 g)

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