InGaAs area image sensor
The G13393-0909W has a hybrid structure consisting of a CMOS readout circuit (ROIC: readout integrated circuit) and back-illuminated InGaAs photodiodes. Each pixel is made up of an InGaAs photodiode and a ROIC electrically connected by indium bump. The timing generator in the ROIC provides an analog video output and AD-TRIG output which are obtained by just supplying digital inputs. The G13393-0909W has 640 × 512 pixels arrayed at a 20 μm pitch and their signals are read out from a video line. Light incident on the InGaAs photodiodes is converted into electrical signals which are then input to the ROIC through indium bumps. Electrical signals in the ROIC are converted into voltage signals and then sequentially output from the video line by the shift register. The G13393-0909W is hermetically sealed in a metal package together with a two-stage thermoelectric cooler to deliver stable operation.
|Spectral response range||950 to 1700 nm|
|Peak sensitivity wavelength (typ.)||1550 nm|
|Image size||12.8 × 10.24 mm|
|Pixel size||20 × 20 μm|
|Pixel pitch||20 μm|
|Number of total pixels||640 × 512 pixels|
|Frame rate (max.)||62 frames/s|
|Dark current (typ.)||0.5 pA|
|Measurement condition||Td=15 ℃, Vdd=Port_sel=Mode01=5 V,Mode02=0 V, Vb1=0.5 V, PD_bias=3 V, Vref=3 V|
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