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Si photodiode

S10043

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Highly reliable photodiode for VUV detection

The S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, the S10043 shows almost no change in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm2.


Features
-Greatly improved sensitivity stability even after exposure to ArF (λ=193 nm) excimer laser.
-Windowless package

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Notice

The chip of this product is not sealed and is exposed. Parts such as electrodes on the chip are not protected by an enclosure or window and so require especially strict care during handling compared to ordinary products.
Before using this product, always read “Unsealed products / Precautions” described below.

Unsealed products / Precautions [PDF]

Specifications

Photosensitive area 10 × 10 mm
Number of elements 1
Package Ceramic
Cooling Non-cooled
Reverse voltage (max.) 5 V
Spectral response range 190 to 1000 nm
Peak sensitivity wavelength (typ.) 720 nm
Photosensitivity (typ.) 0.015 A/W
Dark current (max.) 1000 pA
Rise time (typ.) 9 μs
Terminal capacitance (typ.) 4000 pF
Measurement condition Ta=25 ℃, Photosensitivity: λ=193 nm

Spectral response

k_s10043_sr_xx.jpg

Dimensional outline (unit: mm)

KSPDA0171

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