The S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, the S10043 shows almost no change in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm2.
|Photosensitive area||10 × 10 mm|
|Number of elements||1|
|Reverse voltage (max.)||5 V|
|Spectral response range||190 to 1000 nm|
|Peak sensitivity wavelength (typ.)||720 nm|
|Photosensitivity (typ.)||0.015 A/W|
|Dark current (max.)||1000 pA|
|Rise time (typ.)||9 μs|
|Terminal capacitance (typ.)||4000 pF|
|Measurement condition||Ta=25 ℃, Photosensitivity: λ=193 nm|
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