Dual PHEMOS-X Emission microscope


Failure analysis from both sides is possible with one unit

The Dual PHEMOS-X is designed for advanced, 3D, nontransparent devices where simultaneous optical FA may be required from both sides (front and back) at the wafer or die level.


Dual side analysis

Easy to change between front and backside FA without moving your device to another system.

High accuracy stage designed for advanced devices

Working range of optical stage

  X Y Z
Top side 40 mm 40 mm 80 mm
Bottom side 60 mm 60 mm 20 mm

* Working range might be narrower than these values due to the prober being used and interference with the sample stage or mounting of a NanoLens.

Sample stage (Semiauto prober MPd-1000X C16688-01)

Main function

• XY stage control

• Z, Theta control

X 300 mm
Y 300 mm
Z 22.5 mm
θ +/- 5°

• Wafer mapping function

• Alignment function

• Top side PC and Bottom side PC communicate with the prober PC via LAN

Basic display functions

Superimposed display/contrast enhancement function

* The actual display may differ depending on your software version, environment, etc.

The Dual PHEMOS-X superimposes the emission image on a high-resolution pattern image to localize defect points quickly. 

The contrast enhancement function makes an image clearer and more detailed.


Display function

  • Annotations: Comments, arrows, and other indicators can be displayed on an image at any location desired.
  • Scale display: The scale width can be displayed on the image using segments.  
  • Grid display: Vertical and horizontal grid lines can be displayed on the image.
  • Thumbnail display: Images can be stored and recalled as thumbnails. Image information such as stage coordinates can be displayed.
  • Split screen display: Pattern images, emission images, superimposed images, and reference images can be displayed in a 6-window screen at once.



Main unit: 1900 mm (W) × 2130 mm (H) × 1350 mm (D) , Approx. 2200 kg

System rack: 1060 mm (W) × 1841.5 mm (H) × 715 mm (D) , Approx. 300 kg

Prober rack: 1000 mm (W) × 1800 mm (H) × 650 mm (D) , Approx. 400 kg

Line voltage Single phase 200 V, 220 V    50 Hz/60 Hz
Power consumption Approx. 3300 VA (system rack) / 6600 VA (prober rack)
Vacuum 80 kPa or more
Compressed air 0.5 MPa to 0.7 MPa

*1  Including a regulator

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