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TD Imaging | Failure analysis system
The SEMICONDUCTOR APPLICATION LAB. is a collaborative space designed to foster co-creation with our customers. It offers hands-on demonstrations with actual equipment, including on-site demos with our expert engineers and sample testing prior to purchase.
About TD Imaging
TD Imaging is a new technology suitable for identifying defects in semiconductors with complex structures, such as logic semiconductors. It can pinpoint defects through internal metal layers.
Features
Patented Laser Scan Technology
Improves signal-to-noise ratio (S/N) by 38 times. Hamamatsu owns the patent for laser-based ThermoReflectance, delivering superior precision and reliability in thermal imaging-and continues to lead innovation in this field.
Optimal Wavelength Selection
670 nm light source, compared to 1300 nm, enhances S/N by 4 times on metals like Cu and Al.
Higher Sensitivity
Flexible scan speed, size, and integrations, with data acquisition in 90 seconds, providing higher S/N than LIT.
Comparison of TD Imaging and LIT
Proposed combined workflow
After detecting a wide range of signals using LIT technology, the PFA hit rate is improved by narrowing down the signals to 2 μm using TD Imaging（ThermoDynamic Imaging) while leveraging image processing. This makes defect identification more accurate and enhances the efficiency of analysis.
Related products
The Dual PHEMOS-X is designed for advanced, 3D, nontransparent devices where simultaneous optical FA may be required from both sides (top and bottom) at the wafer or die level.
iPHEMOS-MPX is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.
PHEMOS-X is a high-resolution emission microscope that captures light emission and heat generation caused by semiconductor device failures and identifies the failure location. It can be used for a wide range of applications from power devices to advanced device analysis.
SEMICONDUCTOR APPLICATION LAB.
SEMICONDUCTOR APPLICATION LAB. (located in Joko Factory, Hamamatsu City, Shizuoka Prefecture) is a laboratory designed for co-creation with customers. We have equipment to solve your problems, including semiconductor failure analysis and wafer testing.
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