Features | Micro LED PL inspection system

Three capabilities that photoluminescence measurement makes possible

  • Detects abnormalities in luminescence and wavelength that cannot be detected by Automated Optical Inspection (AOI)
  • Enables 100 % inspection, which is not possible with electroluminescence (EL) inspection
  • Enables inspection in the front-end of the manufacturing process, contributing to higher yields.

Photoluminescence measurement method

What is PL measurement that enables high-speed, non-contact, non-destructive 100 % inspection?

PL measurement is a non-contact, non-destructive method for evaluating LED characteristics by imaging the light emitted from a LED by photoexcitation.


MiNY PL is a unique two-dimensional imaging technology that calculates the emission wavelength in a wafer plane at once without measuring the spectrum using a spectroscope. Compared to spot measurement using a spectroscope, in-plane emission wavelength can be obtained at high speed.

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