VUV ionizer VUV ionizer

Principle and Features | Electrostatic charge removers VUV Ionizer

Please take a look at the short movie of electrostatic charge remover. It includes neutralization principle, characteristics, example of installation via vacuum chamber of the instrument, and operation example of electrostatic chuck.

Reliable and efficient removal of electrostatic charges in a vacuum. Vacuum UV light is the key to eliminating electrostatic charges within a vacuum (depressurized state).

VUV Ionizers are electrostatic charge removers that use "photoionization" to apply vacuum UV light to remove static electricity. This innovative ionization method makes use of unique features of vacuum UV light to eliminate unwanted electrostatic charges in a vacuum (depressurized state) which has been impossible up to now.

High-energy vacuum UV light at wavelengths shorter than 160 nm ensures highly efficient removal of electrostatic charges and in this way eliminates all types of static electricity problems that occur on production lines and a broad range of manufacturing processes.


Principle of electrostatic charge removal: Photoionization mechanism

Irradiating vacuum UV light onto residual atoms and molecules in a vacuum (depressurized state) ejects the electrons from the atoms and molecules, leaving positively charged atoms and molecules (positive ions). These ejected electrons then combine with other residual atoms and molecules to produce negative ions. These electrons and ions are generated simultaneously over the entire space irradiated with vacuum UV light, and the electrons and ions generated near a target object are attracted to static electricity to remove electrostatic charges from the target object. Other electrons and ions generated during this process return to their original residual atoms and molecules.

Highly efficient removal of electrostatic charges in low vacuum to high vacuum conditions eliminates the root causes of static electricity problems thought impossible to solve until now.

It has been impossible for conventional corona-discharge ionizers to remove electrostatic charge in a vacuum (depressurized state) due to their electrostatic charge removal principle.
VUV Ionizers have a vacuum flange that connects to a vacuum chamber and emits vacuum UV light to ionize the residual atoms and molecules in a vacuum (depressurized state). This allows reliable and efficient removal of electrostatic charges in low vacuum to high vacuum conditions.

Completely removes all electrostatic charges


Ions are constantly generated over the entire space irradiated with vacuum UV light to create a high ion density that efficiently removes all electrostatic charges on a target object by neutralizing them to 0 volts.

No worries about "overshoot"


Inherently balanced ionization ensures that positive and negative ions are generated in equal amounts and causes no "overshoot" that might charge the target object to an opposite polarity. So there is absolutely no need to adjust the supply of positive and negative ions.

Overshoot is a phenomenon in which a target object is electrostatically charged at an opposite polarity due to generating an unbalanced amount of positive and negative ions.

Needs no air flow that might badly affect target objects


Electrons and ions are also generated in the vicinity of a target object and are efficiently attracted to the static electricity on the target object to directly remove electrostatic charges. This means there is no longer any need to blow air to move the generated electrons and ions to the target object. Eliminating this air flow prevents emitting any flying dust particles that might badly affect the target object.

Please check the other data to find how irradiating vacuum UV light affects the target object.

Clean design generates no dust


Photoionization or ionization by light is a clean process for removing electrostatic charges since it generates no dust particles or electromagnetic noise. This design eliminates potential problems such as product defects caused by ordinary ionizers due to dust particles and peripheral device malfunctions which might be induced by electromagnetic noise.

Reliable operation over a long life


VUV Ionizers employ a high-quality, high-precision deuterium lamp that we manufacture entirely in-house. This deuterium lamp exhibits high stability and a long lifetime to ensure stable emission of vacuum UV light over long periods of time.

Compatible with low vacuum to high vacuum levels


VUV Ionizers ensure efficient removal of electrostatic charges over a wide range of vacuum levels from low-vacuum to high-vacuum conditions. VUV Ionizers are also useful for removing electrostatic charges in special environments such as inert gas atmospheres.

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