Optical NanoGauge Thickness measurement system
The Optical NanoGauge Thickness measurement system C12562 is a compact, space-saving, non-contact film thickness measurement system designed to easily install in equipment where needed. In the semiconductor industry, measuring silicon thickness is essential due to the spread of through-silicon via technology; and in the film production industry, adhesion layer films are being made ever thinner to meet product specifications. So these industries now require even higher accuracy in thickness measurements ranging from 1 μm to 300 μm. The C12562 allows making accurate measurements across a wide thickness range from 500 nm to 300 μm that include the thin film coating and film substrate thickness as well as the total thickness. The C12562 also offers rapid measurements up to 100 Hz making it ideal for measurements on high-speed production lines.
|Measurable film thickness range (glass)||500 nm to 300 μm*1|
|Measurement reproducibility (glass)||0.02 nm*2 *3|
|Measurement accuracy (glass)||±0.4 %*3 *4|
|Light source||Halogen light source|
|Spot size||Approx. φ1 mm*3|
|Working distance||10 mm*3|
|Number of measurable layers||Max. 10 layers|
|Analysis||FFT analysis, Fitting analysis, Optical constant analysis|
|Measurement time||3 ms/point*5|
|Fiber connector shape||FC|
|External control function||RS-232C, Ethernet|
|Power supply||AC100 V to AC240 V, 50 Hz/60 Hz|
|Power consumption||Approx. 80 VA|
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