Optical MicroGauge Thickness measurement system

C11011 series

The Optical MicroGauge Thickness measurement system C11011 series is a film thickness measurement system utilizing laser interferometry. Allows for high speed measurement at 60 Hz, so it can also be used inline measurement in factories. Combine with the optional mapping system to allow for prototype thickness distribution measurement. It can be used in a wide variety of applications, from monitoring manufacturing processes to quality control.

Features

  • Infrared light measurement for non-transparent (white) samples
  • High-speed measurement at 60 Hz
  • Measurement of wafers with patterns or protective films
  • Long working distance
  • Mapping function (Option)
  • External control available

Specifications

Type number

c11011 product photo

C11011-02

c11011 product photo

C11011-02W

c11011 product photo

C11011-22

c11011 product photo

C11011-22W

Measurement film thickness range (glass) 25 μm to 2.2 mm *1 25 μm to 2.9 mm *1 25 μm to 2.2 mm *1 25 μm to 2.9 mm *1
Measurement film thickness range (silicon) 10 μm to 0.9 mm *2 10 μm to 1.2 mm *2 10 μm to 0.9 mm *2 10 μm to 1.2 mm *2
Measurement reproducibility (glass) 250 nm *3 250 nm *3 250 nm *3 250 nm *3
Measurement reproducibility (silicon) 100 nm *4 100 nm *4 100 nm *4 100 nm *4
Measurement accuracy (silicon) ±0.5 μm(≦500 μm), ±0.1 %(>500 μm) ±0.5 μm(≦500 μm), ±0.1 %(>500 μm) ±0.5 μm(≦500 μm), ±0.1 %(>500 μm) ±0.5 μm(≦500 μm), ±0.1 %(>500 μm)
Light source Infrared LD (1300 nm) Infrared LD (1300 nm) Infrared LD (1300 nm) Infrared LD (1300 nm)
Spot size Approx. Φ60 μm Approx. Φ60 μm Approx. Φ60 μm Approx. Φ60 μm
Working distance 155 mm *5 155 mm *5 155 mm *5 155 mm *5
Number of measurable layers Max. 1 layer Max. 1 layer Max. 10 layers Max. 10 layers
Analysis Peak detection Peak detection Peak detection Peak detection
Shortest tact time 16.7 ms/point 22.2 ms/point 16.7 ms/point 22.2 ms/point
External communication interface RS-232C, PIPE RS-232C, PIPE RS-232C, Ethernet RS-232C, Ethernet
Interface USB 2.0 (Main unit - Computer) USB 2.0 (Main unit - Computer) USB 2.0 (Main unit - Computer) USB 2.0 (Main unit - Computer)
Power supply voltage AC100 V to AC240 V, 50 Hz/60 Hz AC100 V to AC240 V, 50 Hz/60 Hz AC100 V to AC240 V, 50 Hz/60 Hz AC100 V to AC240 V, 50 Hz/60 Hz
Power consumption Approx. 50 VA Approx. 50 VA Approx. 50 VA Approx. 50 VA
Light guide connerctor shape FC FC FC FC

*1: When converted with the refractive index of glass = 1.5.
*2: When converted with the refractive index of silicon = 3.67.
*3: Standard deviation (tolerance) when measuring glass film.
*4: Standard deviation (tolerance) when measuring silicon. 
*5: Optional model with 1000 mm working distance is available. 

Dimensions

c11011 dimensional outline

a8653-02 dimensional outline

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