MEMS mirror


Miniature, high performance
Electromagnetically driven two-dimensional laser scanning MEMS mirror


The S13989-01H is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. High reliability was achieved by employing a hermetic seal package. Electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity.

- Low current operation
- Ultra-miniature size
- Wide optical deflection angle


Type 2-axis raster scan
Operation mode Fast axis: Non-linear mode (resonant mode)
Slow axis: Linear mode
Mirror size φ1.23 mm
Mirror material Aluminium
Optical deflection angle Fast axis: ±20°
Slow axis: ±12 °
Drive frequency (max.) Fast axis: 29.3 kHz (typ.)
Slow axis: 100 Hz

Dimensional outline (unit: mm)

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