Multiband plasma-process monitor
The Multiband plasma-process monitor C10346-01 is a system specifically designed for monitoring the optical plasma emissions that are created during the various manufacturing processes of semiconductors including etching, sputtering, cleaning, and CVD. The MPM can handle multichannel recording in real-time.
|Wavelength range||200 nm to 950 nm|
|Wavelength accuracy||±0.75 nm|
|Wavelength resolution (FWHM)||<2 nm|
|Power supply||AC100 V to AC240 V (50 Hz/60 Hz)|
|Power consumption||Approx. 70 VA|
|Digital output terminal (Determinate signal output)||TTL maximum 5 channels (3 channels maximum when measurement trigger signal is used|
|Digital input terminal (starting measurement trigger signal)||TTL 1 channel Using TTL 5 channel|
|Digital output terminal (Busy signal)||TTL 1 channel Using TTL 4 channel|
|Analog output terminal||2 channels 0 V to 10 V|
|Fiber probe connector||SMA|
|Communicate interface||USB 2.0 Type B|
|Ambient operating temperature||+10 ˚C to +30 ˚C|
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