High-sensitivity Si APD for detection of light with a wavelength of 266 nm


The S14124-20 is an improved Si APD from the S8664 series for high sensitive detection of light with a wavelength of 266 nm used in semiconductor inspection and laser processing equipment. We have achieved a quantum efficiency of 87% at λ=266 nm.

- High sensitivity, quantum efficiency: 87% (λ=266 nm)
- Low capacitance
- Low noise
- High gain


Type Short wavelength type
(low terminal capacitance)
Photosensitive area φ2.0 mm
Package Metal
Package Category TO-8
Peak sensitivity wavelength (typ.) 600 nm
Dark current (max.) 10 nA
Cutoff frequency (typ.) 250 MHz
Terminal capacitance (typ.) 11 pF
Breakdown voltage (typ.) 400 V
Temperature coefficient of breakdown voltage (typ.) 0.78 V/℃
Gain (typ.) 400
Measurement condition Typ. Ta=25 ℃, unless otherwise noted

Quantum efficiency vs. wavelength

Dimensional outline (unit: mm)

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