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Failure analysis system Failure analysis system

Solid Cold Emmi-X camera | Failure analysis system

The SEMICONDUCTOR APPLICATION LAB. is a collaborative space designed to foster co-creation with our customers. It offers hands-on demonstrations with actual equipment, including on-site demos with our expert engineers and sample testing prior to purchase.​

Solid Cold Emmi-X camera

No LN₂ required — enabling stable 24-hour semiconductor emission analysis

The Solid Cold Emmi-X camera is a photoemission analysis camera featuring Solid Cold cooling, a linear cooling mechanism. It offers higher stability and easier maintenance than LN₂-based systems. It combines a wide field of view with a high S/N sensor and high-speed wavelength switching to enable ultra-low-level emission detection. This allows efficient, high-uptime analysis of advanced logic and high-density memory devices.

Features

Highly stable, low-maintenance cooling system

  • High-reliability design with an MTTF of 90 000 hours
  • Stable cooling during continuous 24-hour operation

Wide field of view and high S/N for weak emission detection

  • Wide field imaging with a 1k × 1k sensor
  • Noise reduction enabled by patented technology

High-speed wavelength switching and precise position control

  • Wavelength switching in as fast as 5 seconds
  • High positional accuracy and stability enabled by a gearless single-axis filter wheel

Solid Cold Cooling

  • Non-contact motion driven by a linear motor
  • Long lifetime (MTTF: 90 000 hours)

Measurement example

Related products

The Dual PHEMOS-X is designed for advanced, 3D, nontransparent devices where simultaneous optical FA may be required from both sides (top and bottom) at the wafer or die level.

iPHEMOS-MPX is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by defects.

SEMICONDUCTOR APPLICATION LAB.

SEMICONDUCTOR APPLICATION LAB. (located in Joko Factory, Hamamatsu City, Shizuoka Prefecture) is a laboratory designed for co-creation with customers. We have equipment to solve your problems, including semiconductor failure analysis and wafer testing. 

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