Enabling real-time spectroscopic measurements at the workplace and at home Ultra-compact spectrum sensor

MEMS-FPI spectrum sensor C14273

A new product has been added to the MEMS-FPI*spectrum sensor lineup of ultra-compact near infrared spectrum sensors.
The new C14273 sensor has more sensitivity in the long-wavelength band than the 2 current types. The spectral response range is between 1.75 and 2.15 μm.

The MEMS-FPI spectrum sensor is a ultra-compact sensor that integrates a MEMS-FPI tunable filter that varies its transmission wavelength depending on the applied voltage and an InGaAs PIN photodiode. As a result, spectrophotometry in the near infrared region is possible. In the production and inspection of chemicals, foods, fibers and the like, there is a need to distinguish known (real) components from unknown components using spectroscopic measurement and a need to monitor the moisture level for process control. Meeting these needs requires a robust, compact, low-cost spectroscopic measuring instrument with sensitivities in the infrared region. The MEMS-FPI spectrum sensor meets these requirements.


Product features:

  • Near infrared spectrum sensor
  • Compact: TO-5
  • Lightweight: 1 g
  • Robust: High reliability in high humidity environment (hermetically sealed package)
  • Low cost:
    A simple configuration that integrates a MEMS-FPI tunable filter and InGaAs PIN photodiode in one package (an expensive multichannel element is not used)


Spectral response range 1.35 ~ 1.65 1.55 ~ 1.85 1.75 ~ 2.15 μm
Spectral resolution 18 20 22 nm max.
Storage temperature
Operating temperature
The Evaluation circuit C13294-02 is also available.

The MEMS-FPI spectrum sensor is composed of a MEMS-FPI tunable filter, photosensor (photodiode), and the like. It has a simple struc-ture in which a MEMS-FPI tunable filter and photosensor is arranged on the same axis as the direction of the incident light. Though this product is a spectrum sensor, it uses a single-element photosensor and does not require an expensive multichannel photosensor.

The MEMS-FPI tunable filter has an upper mirror and a lower mirror that are placed opposite each other with an air gap in between them. When a voltage is applied across the mirrors, an electrostatic attractive force is produced to adjust the air gap. To facilitate this action, the upper mirror has a membrane (thin film) structure. If the air gap is mλ /2 (m: integer), it functions as a filter that allows wavelengths near λ to pass through. When the filter control voltage is increased, the air gap is narrowed by the electrostatic attractive force, and the transmission peak wavelength shifts to the short-wavelength side.

C14273 (typical example)


The filter control voltage for any peak transmission wavelength varies in indivisual products.


(1) Data sheet

(2)Technical note