A new product has been added to the MEMS-FPI*spectrum sensor lineup of ultra-compact near infrared spectrum sensors.
The new C14273 sensor has more sensitivity in the long-wavelength band than the 2 current types. The spectral response range is between 1.75 and 2.15 μm.
The MEMS-FPI spectrum sensor is a ultra-compact sensor that integrates a MEMS-FPI tunable filter that varies its transmission wavelength depending on the applied voltage and an InGaAs PIN photodiode. As a result, spectrophotometry in the near infrared region is possible. In the production and inspection of chemicals, foods, fibers and the like, there is a need to distinguish known (real) components from unknown components using spectroscopic measurement and a need to monitor the moisture level for process control. Meeting these needs requires a robust, compact, low-cost spectroscopic measuring instrument with sensitivities in the infrared region. The MEMS-FPI spectrum sensor meets these requirements.
|Spectral response range||1.35 ～ 1.65||1.55 ～ 1.85||1.75 ～ 2.15||μm|
|Spectral resolution||18||20||22||nm max.|
The MEMS-FPI spectrum sensor is composed of a MEMS-FPI tunable filter, photosensor (photodiode), and the like. It has a simple struc-ture in which a MEMS-FPI tunable filter and photosensor is arranged on the same axis as the direction of the incident light. Though this product is a spectrum sensor, it uses a single-element photosensor and does not require an expensive multichannel photosensor.
The MEMS-FPI tunable filter has an upper mirror and a lower mirror that are placed opposite each other with an air gap in between them. When a voltage is applied across the mirrors, an electrostatic attractive force is produced to adjust the air gap. To facilitate this action, the upper mirror has a membrane (thin film) structure. If the air gap is mλ /2 (m: integer), it functions as a filter that allows wavelengths near λ to pass through. When the filter control voltage is increased, the air gap is narrowed by the electrostatic attractive force, and the transmission peak wavelength shifts to the short-wavelength side.
The filter control voltage for any peak transmission wavelength varies in indivisual products.
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