Optical NanoGauge Thickness measurement system


The Optical NanoGauge Thickness measurement system C15151-01 is a non-contact film thickness measurement system utilizing spectral interferometry. The high-power, highly stable white light source enables precise measurement of film thicknesses, even of super-thin films. Also, the light source has a lifetime of 10 000 hours, making it suitable for in-line operation.


・For super-thin film measurement (Glass: from 1 nm, Silicon: from 0.43 nm)

・High accuracy (Measurement reproducibility: ≤ 0.1 nm) *When measuring SiO2 of 2 nm thickness

・Uses a high-power white light source

・Long service life (Maintenance cycle: more than 1 year)

・Supports PLC connections

・Shortening of cycle time (Max. 200 Hz)

・Covers broad wavelength range (200 nm to 790 nm)

・Simplified measurement is added to the software

・Capable of both surface analysis

・Better measurement stability against distance fluctuations

・Analyze optical constants (n, k)


Product number C15151-01
Measurement film thickness range glass*1 : 1 nm to 20 µm
silicon*2 : 0.43 nm*3 to 8.6 µm
Measurement reproducibility glass*4*5 : 0.1 nm
silicon*6 : 1 nm
Measurement accuracy*5 *7 ±0.4 %
Light source High-power white light source
Measurement wavelength range 200 nm to 790 nm
Spot size*5 Approx. Φ1 mm
Working distance *5 From 10 mm
Number of measurable layers Max. 10 layers
Analysis FFT analysis, Fitting analysis, Optical constant analysis
Shortest tact time < 2 ms/point
External communication interface RS-232C, Ethernet
Output signal Analog output : 0 V to 10 V / High impedance 3-channel (Max. 3 layers)
Alarm output : TTL/High impedance 1-channel
Warning output : TTL/High impedance 1-channel
Input signal Measurement start signal : TTL/High impedance 1-channel
Power supply voltage AC100 V to AC240 V, 50 Hz/60 Hz
Power consumption Approx. 130 VA
Light guide connector shape FC

*1 When converted with the refractive index of glass = 1.5.
*2 When converted with the refractive index of silicon = 3.67.
*3 This is a calculated value converted to the refractive index of silicon (3.67).

*4 Standard deviation (tolerance) when measuring 2 nm thick glass film.

*5 Depending on optical system or objective lens magnification to be used.

*6 Standard deviation (tolerance) when measuring 30 μm thick etalon.

*7 Range of measurement guarantee as recorded in the VLSI Standards measurement guarantee document.


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