Optical NanoGauge Thickness measurement system


The Optical NanoGauge Thickness measurement system C13027 is a non-contact film thickness measurement system utilizing spectral interferometry. The C13027 not only supports PLC connections but is also designed more compact than our other models for easy installation into equipment. Our Optical Gauge series is capable of measuring the thickness of extremely thin films down to 10 nm as well as covering a wide range of film thickness from 10 nm up to 100 μm. The Optical Gauge series also makes rapid measurements up to 200 Hz and so is ideal for measurements on high-speed production lines.


  • Supports PLC connections
  • Shortening of cycle time (max. 200 Hz)
  • Capable of measuring 10 nm thin films
  • Simultaneously measure thickness and color
  • Downsized (30 % less installation area compared to C12562)
  • Covers broad wavelength range (400 nm to 1100 nm)
  • Simplified measurement is added to the software
  • Capable of both surface analysis
  • Precise measurement of fluctuating film
  • Analyze optical constants (n, k)
  • Mapping function


Type number C13027-12
Measurable film thickness range (glass) 10 nm to 100 μm*1
Measurement reproducibility (glass) 0.02 nm*2 *3
Measurement accuracy (glass) ±0.4 %*3 *4
Light source Halogen light source
Measurement wavelength 400 nm to 1100 nm
Spot size Approx. Φ1 mm*3
Working distance 10 mm*3
Number of measurable layers Max. 10 layers
Analysis FFT analysis, Fitting analysis, Optical constant analysis, Color analysis
Measurement time 3 ms/point*5
Fiber connector shape FC
External control function RS-232C, Ethernet
Power supply AC100 V to AC240 V, 50 Hz/60 Hz
Power consumption Approx. 80 VA
●Output signal
  Analog output: 0 V to 10 V / High impedance 3-channel (Max. 3 layers)
  Alarm output: TTL / High impedance 1-channel
  Warning output: TTL / High impedance 1-channel
●Input signal
  Measurement start signal: TTL / High impedance 1-channel

*1 When converted with the refractive index of glass = 1.5.
*2 Standard deviation (tolerance) when measuring 400 nm thick glass film.
*3 Depending on optical system or objective lens magnification to be used.
*4 Range of measurement guarantee as recorded in the VLSI Standards measurement guarantee document.
*5 TShortest exposure time.


c13027 dimensional outline



two split light guide dimensional outline

a10192-10 dimensional outline

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