Optical NanoGauge C13027-12 | Hamamatsu Photonics

The Optical NanoGauge Thickness measurement system C13027 is a non-contact film thickness measurement system utilizing spectral interferometry. The C13027 not only supports PLC connections but is also designed more compact than our other models for easy installation into equipment. Our Optical Gauge series is capable of measuring the thickness of extremely thin films down to 10 nm as well as covering a wide range of film thickness from 10 nm up to 100 μm. The Optical Gauge series also makes rapid measurements up to 200 Hz and so is ideal for measurements on high-speed production lines.

Catalog 2.6 MB/PDF

Features
Specifications
Dimensions

Features

Supports PLC connections
Shortening of cycle time (max. 200 Hz)
Capable of measuring 10 nm thin films
Simultaneously measure thickness and color
Downsized (30 % less installation area compared to C12562)
Covers broad wavelength range (400 nm to 1100 nm)
Simplified measurement is added to the software
Capable of both surface analysis
Precise measurement of fluctuating film
Analyze optical constants (n, k)
Mapping function

Specifications

Type number	C13027-12
Measurable film thickness range (glass)	10 nm to 100 μm^*1
Measurement reproducibility (glass)	0.02 nm^{2 3}
Measurement accuracy (glass)	±0.4 %^{3 4}
Light source	Halogen light source
Measurement wavelength	400 nm to 1100 nm
Spot size	Approx. Φ1 mm^*3
Working distance	10 mm^*3
Number of measurable layers	Max. 10 layers
Analysis	FFT analysis, Fitting analysis, Optical constant analysis, Color analysis
Measurement time	3 ms/point^*5
Fiber connector shape	FC
External control function	RS-232C, Ethernet
Power supply	AC100 V to AC240 V, 50 Hz/60 Hz
Power consumption	Approx. 80 VA

●Output signal
　　Analog output: 0 V to 10 V / High impedance 3-channel (Max. 3 layers)
　　Alarm output: TTL / High impedance 1-channel
　　Warning output: TTL / High impedance 1-channel
●Input signal
　　Measurement start signal: TTL / High impedance 1-channel

*1 When converted with the refractive index of glass = 1.5.
*2 Standard deviation (tolerance) when measuring 400 nm thick glass film.
*3 Depending on optical system or objective lens magnification to be used.
*4 Range of measurement guarantee as recorded in the VLSI Standards measurement guarantee document.
*5 TShortest exposure time.