|波長範囲||170 ～ 2500||nm|
|プラズマサイズ (FWHM)||平均値||125 × 320||μm|
|分光放射輝度(at 500 nm)||平均値||75||mW/mm2·sr·nm|
|窒素パージ||Grade 3以上, filtered to 5 μm. 138 kPa ±13.8 kPa||－|
|定格||入力電圧(AC)||100 ～ 240||V|
|電源周波数||50 / 60||Hz|
*3 オプションでYAG(190 nm ～ 2500 nm)、BK7(350 nm ～ 2500 nm)も選択可能です。
*4 水冷条件 ランプヘッド： ≧0.5 L/min, 18℃～ 30 ℃, 0.69 MPa (100 psiG) max. inlet pressure、 コントローラ： 冷却不要
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