Japan (JA)
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レーザ励起プラズマ光源 LDLS
EQ-77X-QZ-S
高出力タイプのレーザ励起プラズマ光源で、スタンダードモデルのEQ-99Xに比べて約3倍の放射輝度です。高出力タイプのため、ランプヘッドの窒素パージと水冷用チラー接続が必要です。
特長
- 広波長域：170 nm~2500 nm
- 長寿命：10 000時間
- 高輝度点発光
分光放射輝度
仕様
| 項目 | 内容/値 | 単位 | ||
|---|---|---|---|---|
| 出力方法*1 | 拡散照射（シングルビーム） | － | ||
| 波長範囲 | 170 ～ 2500 | nm | ||
| プラズマサイズ (FWHM) | 平均値 | 125 × 320 | μm | |
| 拡散角度 | NA | 0.5 | － | |
| バルブ寿命*2 | 代表値 | 10 000 | h | |
| ウォームアップ時間 | 30 | min | ||
| レーザクラス | Class 1 | － | ||
| 分光放射輝度(at 500 nm) | 平均値 | 75 | mW/mm2·sr·nm | |
| 放射束 | 平均値 | 2.75 | W | |
| 出射窓サイズ | Φ22 | mm | ||
| 窓材*3 | 石英 | － | ||
| 冷却方法 | 水冷*4*5 | － | ||
| 窒素パージ | Grade 3以上, filtered to 5 μm. 138 kPa ±13.8 kPa | － | ||
| 適合規格 | EN 61010-1 EN 61326-1 IEC 60825-1 IEC 62471 EN 50581 |
－ | ||
| 装置構成 | ランプヘッド、電源コントローラ、リモコン、各種ケーブル | － | ||
| 定格 | 入力電圧(AC) | 100 ～ 240 | V | |
| 電源周波数 | 50 / 60 | Hz | ||
| 消費電力 | 350 | W | ||
*1 オプションでデュアルビーム方式も選択可能です。
*2 汚れや使用状況によっては、窓の交換が必要な場合もございます。
*3 オプションでYAG(190 nm ～ 2500 nm)、BK7(350 nm ～ 2500 nm)も選択可能です。
*4 水冷条件 ランプヘッド： ≧0.5 L/min, 18℃～ 30 ℃, 0.69 MPa (100 psiG) max. inlet pressure、 コントローラ： 冷却不要
*5 チラーキットはオプションとなります。
外形寸法図（単位：mm）
ランプヘッド
電源コントローラ
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