|放射波長 (Short)||185 nm|
|放射波長 (Long)||2000 nm|
|光出力安定度 ドリフト Typ.||±0.5 %/h|
|光出力安定度 フラツキ (p-p) Max.||2 %|
|供給電圧 Min.||80 V dc|
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