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QPM光学モジュール
C16999-10
表面欠陥を検出するインライン対応の高速干渉顕微鏡（高倍率タイプ）
ナノレベルの高さ分解能が得られる干渉顕微鏡「定量位相顕微鏡（QPM：Quantitative Phase Microscopy）」の光学モジュールです。弊社独自技術により、筐体の小型軽量化と高速測定（高リアルタイム性）を実現しています。
C16999-10は、20倍 / 10倍 / 5倍の対物レンズに対応する高倍率タイプです。
特長
- 小型軽量
- インライン対応（装置組込用）
- 高速測定（高リアルタイム性）
- トータルコスト低減
- 20倍 / 10倍 / 5倍の対物レンズに対応する高倍率タイプ
仕様
| 項目 | 高倍率モデル | 低倍率モデル | 超低倍率モデル | 単位 | ||||
|---|---|---|---|---|---|---|---|---|
| C16999-10 | C16999-20 | C16999-30 | ||||||
| 対物レンズ（別売） | A17086-10 | A17086-20 | A17086-30 | A17086-40 | A17086-50 | A17086-60 | A17086-70 | ‐ |
| 対物レンズ倍率 | 20 倍 | 10 倍 | 5 倍 | 10 倍 | 5 倍 | 2 倍 | 1.25 倍 | - |
| 垂直分解能*1 | 0.5 nm以下 | nm | ||||||
| 水平分解能 | 0.72 | 1.1 | 2.2 | 1.1 | 2.2 | 4.1 | 8.1 | μm |
| 視野 | 0.707 × 0.517 | 1.41 × 1.04 | 2.83 × 2.07 | 1.41 × 1.04 | 2.83 × 2.07 | 7.07 × 5.17 | 11.3 × 8.28 | mm |
| 位相画像撮像速度*2 | 25 | fps | ||||||
| Zレンジ | ±1.3 | ±3 | ±12 | ±3 | ±12 | ±12 | ±15 | μm |
| W.D. | 3.1 | 11 | 20 | 11 | 20 | 6.2 | 5 | mm |
*1 テストチャートの段差に対する光路再現性となります。
*2 カメラフレームレート200 fps にて撮影した場合。
注）仕様は弊社推奨カメラおよび弊社推奨鏡筒を組み合わせた場合の各対物レンズ使用時の光学性能となります。
外形寸法図
代表例：QPM光学モジュール C16999-10 ＋ 対物レンズ A17086-20
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