Japan (JA)
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MiNY PL マイクロLED PL検査装置
C15740-01
MiNY PL は、フォトルミネッセンス（PL）計測法を用いたマイクロLED ウェーハの検査装置です。
仕様
| 型名 | C15740-01 |
|---|---|
| 対応ウェーハサイズ | 100 mm（4インチ） または150 mm（6インチ）（他サイズ応相談） |
| 計測時間 | 約12分（対物レンズ10×、 PL計測、4インチウェーハ） |
| PL 計測波長 | R、G、B |
| 空間分解能 | 1 μm/pixel （標準モード）、0.5 μm/pixel （High resolutionモード） |
| 計測項目 | 形状異常、PL輝度、PL波長 |
| 外形寸法 / 重量 | 2000 mm（W） × 1878 mm（H） × 1130 mm（D） / 約1800 kg |
| クリーンルーム対応 | 可 |
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