S13989-01Hは、当社独自のMEMS*1技術を応用して作製した電磁駆動式MEMSミラーです。 X軸とY軸の2軸動作により、レーザ光などの反射による2次元スキャン (ラスタースキャン)*2を可能とします。
一般的に電磁式ミラーは、ミラーチップの周囲に磁石を配置する構成ですが、 当社のMEMSミラーは、強力な小型磁石をミラーチップ下に配置し、 小型でありながら広い光学的振れ角 (高速軸: ±20°、低速軸: ±12°)を実現しています。
また、気密封止パッケージによる高い信頼性、低電圧駆動、光学的振れ角を任意に設定できるリニア動作*3も特長としています。
マシンビジョンによる形状認識、レーザ測距、無人搬送車などの障害物検知、 レーザ走査型顕微鏡など、2次元/3次元情報を得るためのさまざまなスキャン機構に応用いただけます。
*1: Micro-Electro-Mechanical Systems
*2: 2次元画像を構成するスキャン方法。まず1次元的にスキャンして線を得て、次にその直角方向にその線をスキャンし画像を構成する。
*3: 低速軸
1) マシンビジョン
2) レーザ距離計測
3) レーザ顕微鏡
1次元スキャン用MEMSミラーに加えて、2次元スキャン用ミラーをラインアップに加えました。用途に応じてお選びください。
型名 | S12237-03P | NEW S13989-01H |
---|---|---|
写真 | ||
タイプ | 1次元スキャン用 | 2次元スキャン用 |
スキャンモード | 1軸リニアスキャン | 2軸ラスタースキャン |
動作モード | リニアモード | 高速軸: ノンリニアモード (共振モード) 低速軸: リニアモード |
ミラーサイズ | φ2.6 mm | φ1.23 mm |
ミラー材質 | アルミニウム | アルミニウム |
光学的振れ角 | ±15° | 高速軸: ±20° 低速軸: ±12° |
駆動周波数 | 100 Hz max. | 高速軸: 29.3 kHz typ. 低速軸: 100 Hz max. |
推奨動作温度範囲 | -20~+70 ℃ | -20~+60 ℃ |
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