S13989-01Hは、当社独自のMEMS*1技術を応用して作製した電磁駆動式MEMSミラーです。 X軸とY軸の2軸動作により、レーザ光などの反射による2次元スキャン (ラスタースキャン)*2を可能とします。
一般的に電磁式ミラーは、ミラーチップの周囲に磁石を配置する構成ですが、 当社のMEMSミラーは、強力な小型磁石をミラーチップ下に配置し、 小型でありながら広い光学的振れ角 (高速軸: ±20°、低速軸: ±12°)を実現しています。
*1: Micro-Electro-Mechanical Systems
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