S13989-01Hは、当社独自のMEMS*1技術を応用して作製した電磁駆動式MEMSミラーです。 X軸とY軸の2軸動作により、レーザ光などの反射による2次元スキャン (ラスタースキャン)*2を可能とします。
一般的に電磁式ミラーは、ミラーチップの周囲に磁石を配置する構成ですが、 当社のMEMSミラーは、強力な小型磁石をミラーチップ下に配置し、 小型でありながら広い光学的振れ角 (高速軸: ±20°、低速軸: ±12°)を実現しています。
*1: Micro-Electro-Mechanical Systems
|動作モード||リニアモード||高速軸: ノンリニアモード (共振モード)
|ミラーサイズ||φ2.6 mm||φ1.23 mm|
|駆動周波数||100 Hz max.||高速軸: 29.3 kHz typ.
低速軸: 100 Hz max.
|推奨動作温度範囲||-20～+70 ℃||-20～+60 ℃|
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