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高解像度X線イメージングシステム
M11427シリーズ
高解像度X線イメージングシステムは、入射したX線ビームを蛍光体で可視化するイメージングユニットとカメラを組み合わせたシステムです。高解像度X線イメージングユニット本体と蛍光面※、光学系※をお選びいただくだけで、容易にX線イメージングを行うことができます。カメラはラインアップから自由に選択することができ、用途にあわせて光学系とカメラを組み合わせてシステムを構築することができます。また装置の耐久性やメンテナンス性を考慮した光学設計で、放射光施設などで使用される強いX線を用いたイメージングに対応します。
※オプション
特長
- 耐X線設計でカメラのダメージを低減
- 用途に合わせてカメラを容易に交換
- コントローラでフォーカス調整
- アタッチメント構造でパーツの交換が可能
- X線イメージングの常識を一新する高耐久性単結晶蛍光面（オプション）
用途
- シンクロトロンイメージング
- X線ビーム・アライメント
- X線CT
- X線顕微鏡
- X線トポグラフィー
- XAFS
撮像例
SiC 欠陥観察
撮像条件
| 手法 | Ｘ線トポグラフィー |
|---|---|
| カメラ | ORCAⓇ-Flash4.0 V3 |
| 撮影対象 | SiC 単結晶基板（結晶中の転位） |
| 露光時間 | 10 s |
| Ｘ線エネルギー | 9 keV |
| 画素サイズ | 0.65 μm |
| 撮影倍率 | × 10 |
| 対象画像の画素数 | 1970 pixels × 1970 pixels （1.28 mm × 1.28 mm） |
| 蛍光面 | LuAG 10 μm |
【提供】三重大学 研究基盤推進機構 半導体・デジタル未来創造センター教授（兼）ファインセラミックスセンター 材料技術研究所 客員主管研究員 姚 永昭 様（Yongzhao YAO, Ph.D）
木材の内部監察
撮像条件
| 手法 | Ｘ線タイコグラフィー |
|---|---|
| カメラ | ORCA-Fusion BT |
| 撮影対象 | 爪楊枝 |
| 露光時間 | 10 ms/ 投影 |
| 投影数 | 1800 |
| Ｘ線エネルギー | 15 keV |
| 画素サイズ | 0.65 μm |
【提供】一般財団法人 光科学イノベーションセンター 様
高耐久性単結晶蛍光面
高解像度X線イメージングシステムAA51にオプションで選択できる直接接合タイプの蛍光面は、非常に高いX線耐久性を持つ単結晶蛍光面です。X線による蛍光面の破壊を抑え、長時間の安定したイメージング・計測を実現します。
放射光白色X線
白色X線を長時間入射しても、破壊が起きていないことが確認できます。
測定条件
| ビームライン | SPring-8 BL28B2 |
|---|---|
| X線エネルギー | 白色 |
| アッテネータ | 空気（9 m）、アルミニウム（0.034 mm）、Be窓（ビームライン側 1 mm 厚 + 検出器側 0.5 mm 厚） |
| ビームサイズ | 3 mm × 3 mm |
| 検出器 | 接着剤接合タイプ：AA40（f=50 mm）+ ORCA-Flash2.8（f=35 mm） 直接接合タイプ：AA40（f=50 mm）+ ORCA-Flash4.0（f=50 mm） |
| ピクセル分解能 | 接着剤接合タイプ：5.1 μm/pixel、直接接合タイプ：6.5 μm/pixel |
| 蛍光面 | LuAG（厚さ：接着剤接合タイプ 約 20 μm、直接接合タイプ 約 20 μm） |
【データ提供】公益財団法人 高輝度光科学研究センター 産業利用推進 主幹研究員 梶原堅太郎 様
フラックス密度 4.7 ×1013 photons/s/mm2
高フラックス密度のX線を約20倍の長時間にわたって入射しても、破壊が起きていないことが確認できます。
測定条件
| ビームライン | SPring-8 BL47XU |
|---|---|
| X線エネルギー | 8 KeV |
| アッテネータ | なし |
| フラックス密度 | 4.7×1013 photons/s/mm2 |
| ビームサイズ | 350 μm × 350 μm |
| 検出器 | AA50（対物レンズ 10×/NA 0.3）+ C13949-50U |
| ピクセル分解能 | 0.21 μm/pixel |
| 蛍光面 | LuAG（厚さ：接着剤接合タイプ 22.3 μm、直接接合タイプ 21.4 μm） |
【データ提供】公益財団法人 高輝度光科学研究センター 利用研究促進部門 主席研究員 上杉健太朗 様
外形寸法図
カメラアプリケーション事例集
「放射光科学が解き明かす小惑星「リュウグウ」の物質構造 」カメラアプリケーション事例集
太陽系が誕生したとされている46億年前の水や有機物が今もなお存在していると推測されている小惑星「リュウグウ」。そのサンプル分析を世界有数の実験施設「SPring-8」で担当された高輝度光科学研究センター上杉健太朗氏に、放射光を用いた分析方法や分析の成果、放射光科学の展望についてお伺いしました。本事例集では、上杉氏へのインタビューと放射光イメージングに適した弊社のカメララインアップを掲載しています。
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