超短パルスファイバレーザ
半導体ウエハ処理やマイクロマシニング用途における厳しい要件を満たすように設計されており、信頼性に優れています。
コンパクトなaeroPULSE PSは最先端のモードロック技術を採用しており、優れた長期安定性、極めて狭い線幅、低ノイズ、高品質なTEM00モードを兼ね備えた超短ピコ秒パルスを提供します。
aeroPULSE PS40は標準仕様として、波長1030 nmにおいて最大40 Wの出力を提供します。また、ご要望に応じてSHGを含めその他の波長にも対応可能です。
本製品は、19インチラックマウント対応の制御ユニットと、水平・垂直どちらでも設置可能なレーザヘッドで構成されています。レーザーヘッドは、低出力性能向けの空冷式と、高出力性能向けの水冷式を選択できます。
本製品は、RS-232インターフェースを介してリモート制御が可能で、主要パラメータの詳細なオンボードデータロギング機能を搭載しています。当社独自の製造技術により製品品質を確保し、厳密に管理されたサプライチェーンによって一貫した品質を実現しています。
| 出力*1 | 最大40 W |
|---|---|
| 波長*1 | 1030 nm |
| パルス幅 | 5 ps |
| 繰り返し周波数*1 | 10 MHz ~ 400 MHz |
| 偏光 | 直線偏光 (PER > 17 dB) |
| ビーム径 | ≈1 mm |
| ビーム広がり角 | 1.6 ± 0.2 mrad |
| 基本空間モード | M2 ≤ 1.2 |
| 出力変動 (50時間) | < 0.5 % |
| ウォームアップ時間 | < 1 min |
*1 その他の値をご希望の場合はご相談ください。
| システム冷却方式 | 水冷式 *1 (低出力向けに空冷オプションあり) |
|---|---|
| 動作温度 | +18 ℃ ~ +30 ℃ |
| 保存温度 | -10 ℃ ~ +60 ℃ |
| レーザヘッド寸法 (W×H×L) | 335.5 mm × 100 mm × 450 mm |
| 制御ボックス寸法 | 375 mm × 177 mm × 440 mm (4U 19インチラック) |
| レーザヘッド重量 | 10.2 kg |
| 制御ボックス重量 | 最大14.7 kg |
*1 チラーは別途ご用意ください。必要な仕様についてはお問い合わせください。
| コンピュータインターフェース | USB 2.0、RS-232 |
|---|---|
| 動作電圧 | 100 VAC ~ 240 VAC、50 Hz / 60 Hz |
| 消費電力 | < 330 W |
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