X15213シリーズには、使用する光源波長に対して8つのタイプを用意しています。誘電体多層膜ミラータイプ (-02/-03/-05/-13/-16)とアルミミラータイプ (-01/-07/-08)に大別されます。誘電体多層膜ミラータイプには、素子の反射率を高めるためにレーザの波長に対応した誘電体多層膜ミラー [-02: チタンサファイアレーザ (800 nm帯), -03: YAGレーザ (1064 nm), -05: LD (405 nm), -13: YAGレーザ第2高調波 (532 nm)/He-Neレーザ (633 nm), -16: YAGレーザ第2高調波 (532 nm)]が形成されています。誘電体多層膜ミラーによって反射率を高めることにより、内部での吸収率も低減されているため、ハイパワーレーザにも対応することが可能ですが、カバーする波長域は狭くなっています。アルミミラータイプは、CMOSチップ上のアルミ電極による反射を利用しており、反射率は前者に劣りますが、反射波長域は広くなっており、400 nm～1550 nmを3タイプでカバーしています。-08タイプにおいては、1350～1400 nmの波長帯でガラス基板の吸収により反射率が5％程度低下します。532 nm帯用の誘電体多層膜ミラータイプには-13と-16があり、-16は-13に比べて短パルスレーザに対して耐光性が高い設計となっています。波長帯域を示す-02・-03・-16の後にLまたはRを追加したものが、水冷タイプです (水流用コネクタの位置: 左 L、右 R)。
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