Japan (JA)
国・地域を選択してください。
特許情報 | ステルスダイシング™技術
ステルスダイシング™技術は、レーザを用いた全く新しい概念のレーザダイシング技術です。「完全ドライプロセス」「切削ロスゼロ」「チッピングレス」「高い抗折強度」などの特長により、MEMSデバイスやメモリデバイスなど、適応デバイスは拡大しています。
SDBG（Stealth Dicing Before Grinding）プロセス
高スループットでの極薄・高抗折強度デバイスの実現
厚さ 50 μm以下の極薄デバイスのチップ強度向上を目的に弊社が提案するのがSDBG（Stealth Dicing Before Grinding）プロセスです。SDBGプロセスはレーザ加工によって改質層およびき裂を形成した後、研削・研磨でデバイスを薄くする手法です。研削・研磨によってSD層（改質層）まで取り除くことで、チップ強度低下の要因がなくなり、高品質・高強度な極薄チップの作製が可能となります。
DAF（Die Attach Film）付ウェーハやLow-k膜を含む積層パターンが付いたSiウェーハなどへの展開が可能になります。
プロセスフロー例
2. レーザ照射
SD層の様態はBHC(*4)となります。
3. 研削・研磨
研削・研磨によってSD層まで取り除きます。
5. エキスパンド
エキスパンドによりDAF(*3)も同時に切断します。
（DAFに対する加工は不要です。）
NOTE：デバイスによってプロセスが異なる可能性があります。
ステルスダイシング技術では、SDBGプロセス実用化におけるソリューションとして、浜松ホトニクスが独自開発したLCOS-SLM（Liquid Crystal on Silicon - Spatial Light Modulator）を搭載したステルスダイシング専用光学系 LBA（ Laser Beam Adjuster）が採用されています。LCOS-SLMは、光の位相を自由に変調可能な反射型の空間光位相変調器であり、その液晶面に任意のパターンを表示することにより、お客様のアプリケーションに応じた高品質・高スループットなレーザ加工を実現します。
レーザ光はビームエキスパンダにより最適な形状に拡張され、任意のパターンを表示したLCOS-SLMに照射されます。次に、LCOS-SLMの液晶によって位相変調されたレーザ光は、像転送光学系を通り、対物レンズ面にその波面形状が像転送されます。その後、対物レンズを通って、ウェーハ内部に集光されます。
LBAはウェーハ内部のレーザ光に対して最適な補正・分岐を行うことが可能です。収差補正では、ウェーハの深さに応じて集光性を改善することで、SD層からのき裂を伸ばし、SD層の数を削減することが可能です。多点同時加工では、対物レンズから照射されるレーザ光を複数に分岐してウェーハの厚み方向に複数のSD層を同時形成することが可能となります。分岐された各レーザ光は、それぞれ深さに応じた収差補正やレーザ出力比率の調整をすることも可能です。また、レーザ進行方向への分岐も可能であり、低周波数レーザでの高速加工や同時加工による品質改善に寄与します。
主要光学系配置例
レーザ光集光図・断面写真
収差補正あり
収差補正なし
多点同時加工あり
（赤色：SD層／白色：き裂）
多点同時加工なし
（赤色：SD層／白色：き裂）
NOTE：レーザ光の集光図はイメージです。
SDBGプロセスを実現する弊社保有特許
ステルスダイシング技術は、約20年前に開発され、その後のレーザ・光学系の継続的な改良により、幅広いデバイス・材料での採用が進んでいます。また、SDBGプロセスを用いることにより、ステルスダイシング技術の開発当初に目指していたメモリデバイスでの量産も始まっています。
高性能なステルスダイシング技術を採用される場合には、付加価値のある加工に対して複数の特許がありますので、事前にご確認ください。ここではSDBGプロセスやそれに関わるステルスダイシング専用光学系 LBAの弊社保有特許をご紹介します。
| 国 | SDBGプロセス （Stealth Dicing Before Grinding） 保有特許番号 |
ステルスダイシング専用光学系 LBA（Laser Beam Adjuster） 保有特許番号 |
|---|---|---|
| 日本 | 4995256, 4358762, 3762409, 4781661, 4563097 | 5863891, 6258787, 5575200, 5255109, 5479925, 5148575, 5692969, 5599563, 4402708, 5775265, 5844089 |
| アメリカ | 8268704, 7566635, 8304325, 8314013, 8518800, 8518801, 8519511, 8889525, 9142458, 9287177, 9711405, 9553023, 9548246, 9543207, 9543256, 10068801, 10622255, 7939430, 8058103, 8551817 |
8134099, 9428413, 10622254, 10328521, 8755107, 8526091, 9415461, 9488831, 10324285, 8610993, 8441709, 9001411 |
| 韓国 | 10-0715576, 10-0848408, 10-1283294, 10-0827879 | 10-1013286, 10-1212936, 10-1302336, 10-1402475, 10-1711247, 10-1564523, 10-1711311, 10-2303178, 10-1839439, 10-1708066, 10-1708161, 10-1605219, 10-1577096 |
| 中国 | ZL03805866.9, ZL200510085444.0, ZL200610164347.5, ZL200610164346.0, ZL200710182348.7, ZL200580038895.7, ZL200480026066.2 |
ZL200880101826.X, ZL201010525444.9, ZL201210046724.0, ZL201410002145.5, ZL201580028164.8, ZL201180007586.9, ZL200980134183.3, ZL201410406348.0, ZL200980152729.8, ZL200980152900.5 |
| 台湾 | I278027, I363665, I321828 | I394627, I573649, I595953, I638697, I515065, I524958 |
| ドイツ | 60339137.0, 60337873.0, 60313900.0, 60350530.9, 60350449.3, 60352263.7, 602005045636.8, 602004031963.5 |
602008044635.2, 602009051537.3, 602009041607.3, 602009041757.6 |
- Confirmation
-
It looks like you're in the . If this is not your location, please select the correct region or country below.
You're headed to Hamamatsu Photonics website for JP (Japanese). If you want to view an other country's site, the optimized information will be provided by selecting options below.
In order to use this website comfortably, we use cookies. For cookie details please see our cookie policy.
- Cookie Policy
-
This website or its third-party tools use cookies, which are necessary to its functioning and required to achieve the purposes illustrated in this cookie policy. By closing the cookie warning banner, scrolling the page, clicking a link or continuing to browse otherwise, you agree to the use of cookies.
Hamamatsu uses cookies in order to enhance your experience on our website and ensure that our website functions.
You can visit this page at any time to learn more about cookies, get the most up to date information on how we use cookies and manage your cookie settings. We will not use cookies for any purpose other than the ones stated, but please note that we reserve the right to update our cookies.
1. What are cookies?
For modern websites to work according to visitor’s expectations, they need to collect certain basic information about visitors. To do this, a site will create small text files which are placed on visitor’s devices (computer or mobile) - these files are known as cookies when you access a website. Cookies are used in order to make websites function and work efficiently. Cookies are uniquely assigned to each visitor and can only be read by a web server in the domain that issued the cookie to the visitor. Cookies cannot be used to run programs or deliver viruses to a visitor’s device.
Cookies do various jobs which make the visitor’s experience of the internet much smoother and more interactive. For instance, cookies are used to remember the visitor’s preferences on sites they visit often, to remember language preference and to help navigate between pages more efficiently. Much, though not all, of the data collected is anonymous, though some of it is designed to detect browsing patterns and approximate geographical location to improve the visitor experience.
Certain type of cookies may require the data subject’s consent before storing them on the computer.
2. What are the different types of cookies?
This website uses two types of cookies:
- First party cookies. For our website, the first party cookies are controlled and maintained by Hamamatsu. No other parties have access to these cookies.
- Third party cookies. These cookies are implemented by organizations outside Hamamatsu. We do not have access to the data in these cookies, but we use these cookies to improve the overall website experience.
3. How do we use cookies?
This website uses cookies for following purposes:
- Certain cookies are necessary for our website to function. These are strictly necessary cookies and are required to enable website access, support navigation or provide relevant content. These cookies direct you to the correct region or country, and support security and ecommerce. Strictly necessary cookies also enforce your privacy preferences. Without these strictly necessary cookies, much of our website will not function.
- Analytics cookies are used to track website usage. This data enables us to improve our website usability, performance and website administration. In our analytics cookies, we do not store any personal identifying information.
- Functionality cookies. These are used to recognize you when you return to our website. This enables us to personalize our content for you, greet you by name and remember your preferences (for example, your choice of language or region).
- These cookies record your visit to our website, the pages you have visited and the links you have followed. We will use this information to make our website and the advertising displayed on it more relevant to your interests. We may also share this information with third parties for this purpose.
Cookies help us help you. Through the use of cookies, we learn what is important to our visitors and we develop and enhance website content and functionality to support your experience. Much of our website can be accessed if cookies are disabled, however certain website functions may not work. And, we believe your current and future visits will be enhanced if cookies are enabled.
4. Which cookies do we use?
There are two ways to manage cookie preferences.
- You can set your cookie preferences on your device or in your browser.
- You can set your cookie preferences at the website level.
If you don’t want to receive cookies, you can modify your browser so that it notifies you when cookies are sent to it or you can refuse cookies altogether. You can also delete cookies that have already been set.
If you wish to restrict or block web browser cookies which are set on your device then you can do this through your browser settings; the Help function within your browser should tell you how. Alternatively, you may wish to visit www.aboutcookies.org, which contains comprehensive information on how to do this on a wide variety of desktop browsers.
5. What are Internet tags and how do we use them with cookies?
Occasionally, we may use internet tags (also known as action tags, single-pixel GIFs, clear GIFs, invisible GIFs and 1-by-1 GIFs) at this site and may deploy these tags/cookies through a third-party advertising partner or a web analytical service partner which may be located and store the respective information (including your IP-address) in a foreign country. These tags/cookies are placed on both online advertisements that bring users to this site and on different pages of this site. We use this technology to measure the visitors' responses to our sites and the effectiveness of our advertising campaigns (including how many times a page is opened and which information is consulted) as well as to evaluate your use of this website. The third-party partner or the web analytical service partner may be able to collect data about visitors to our and other sites because of these internet tags/cookies, may compose reports regarding the website’s activity for us and may provide further services which are related to the use of the website and the internet. They may provide such information to other parties if there is a legal requirement that they do so, or if they hire the other parties to process information on their behalf.
If you would like more information about web tags and cookies associated with on-line advertising or to opt-out of third-party collection of this information, please visit the Network Advertising Initiative website http://www.networkadvertising.org.
6. Analytics and Advertisement Cookies
We use third-party cookies (such as Google Analytics) to track visitors on our website, to get reports about how visitors use the website and to inform, optimize and serve ads based on someone's past visits to our website.
You may opt-out of Google Analytics cookies by the websites provided by Google:
https://tools.google.com/dlpage/gaoptout?hl=en
As provided in this Privacy Policy (Article 5), you can learn more about opt-out cookies by the website provided by Network Advertising Initiative:
http://www.networkadvertising.org
We inform you that in such case you will not be able to wholly use all functions of our website.
Close