EBエンジン
低エネルギー電子線照射源EB-ENGINEは加速電圧を50 kV ~ 70 kVまで可変でき、300 mm幅試料への均一な電子線照射が可能です。照射源を並列配置することにより、幅広なフィルムなどへの一括照射や、縦横に配置することにより立体構造物にも対応可能です。
■特長
加速電圧:50 kV ~ 70 kV
管電流:0.1 mA ~ 8.0 mA
有効照射幅:300 mm
照射能力:90 kGy・m/min/mA
低エネルギー電子線は対象となる薄膜や材料表面への高い処理効果(エネルギー効率)を実現します。また、深部への電子線の透過がないため、意図していない材料内部のダメージ(劣化)がありません。
低加速電圧化により電子線照射源の小型軽量化、X線遮へい設備の簡易化を実現しました。従来の電子線照射源の場合は大掛かりな設備導入が必要でしたが、EB-ENGINEはライン構築が容易で、既存ラインへの後付け設置も可能です。
X線遮へい設備の簡易化により導入におけるイニシャルコストを大幅に削減できます。また、高いエネルギー効率と低加速電圧化により省電力化を実現したことで、ランニングコスト削減も実現します。
電子線が高分子主鎖間の結合を促して構造変化をさせることで、機械的強度向上や耐熱性/耐久性の向上といった高機能化を実現します。
添加剤やコーティング剤を使用せずに材料や部品に付加価値を与えることが可能です。
電子線が分子間の結合を促してネットワークを形成することで、インキの乾燥やコーティング剤/接着剤の硬化等を実現します。
反応開始剤(化学物質)を必要としない環境負荷低減を実現した手法です。また、熱や臭気を抑えられるため製造工程における作業環境改善にも貢献します。
電子線が直接生物のDNAなどにダメージを与える直接作用や、電子線が細胞中の水分子と化学反応を起こすことで発生するラジカルが生物のDNAなどにダメージを与える間接作用により、微生物(細菌類)が死滅します。
化学薬品を使用せず、高い滅菌効果が得られます。医療用途・食品用途をはじめ、さまざまな分野に貢献します。
Graftとは「接ぎ木」という意味があり、高分子材料などに電子線を照射し、分子間の結合を切断させラジカル(活性種)を発生させます。その部分に新たに別の高分子、または低分子材料を合成(接ぎ木)させます。このような反応をグラフト重合と呼び、樹脂部材やフィルム材料の表面改質、または特殊糸や布などの繊維材料に応用されます。
自動車で使用される材料・部品等の表面改質、機能性付与や架橋による特性向上を通じ、自動車の性能アップに貢献します。
具体的用途
電子線を用いた容器・器具の低温・ドライ滅菌処理、又は表面改質、グラフト重合を応用した特殊材料の生産が可能となります。
具体的用途
EBインキは反応効率が高く高速乾燥が可能、さらに光重合開始剤が不要で臭気、VOC排出、マイグレーションを低減させることができます。
具体的用途
前工程におけるSiウェハのドライ洗浄、レジスト、誘電体、絶縁層などの各種薄膜の特性改善に応用が可能です。
具体的用途
低エネルギー電子線照射装置
弊社デモルームにて立会い実験、サンプル預かり実験を行っております。様々な電子線照射条件を設定可能です。
ご要望の方は弊社ウェブサイトよりお問い合わせください。
3次元モンテカルロシミュレーションにより、さまざまな電子線照射条件(加速電圧、管電流、照射距離)における被照射物内部の線量分布を任意の厚さで計算することができます。
立会い実験での電子線照射条件設定や実験結果の検証等、低エネルギー電子線照射プロセス設計をサポートしております。
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