Japan (JA)
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動作特性 | レーザ金属加工向けタイプ
高い光利用効率
入射光強度に対する0次回折光強度の比で表される光利用効率が高いという特長があります。この光利用効率は、主に画素構造による回折ロスと素子に形成されたミラーの反射率に依存します。そこで、CMOS技術を応用するとともに、その設計に細心の注意を払うことにより、回折ロスを5 %以下と最小限に抑えています。レーザ金属加工向けタイプでは、ミラーとして作用する画素電極上に誘電体多層膜を形成して反射率を高めました。素子内部における光の吸収が低減されるため、非常に高い光利用効率を実現しています。
| 型名 | レーザ金属加工向けタイプ |
|---|---|
| -03CL/-03CR | |
| 光源の波長 (nm) | 1064 |
| 光利用効率 (%) | 97 |
大きな位相変調特性と高い線形性
対応波長の範囲内において、2π以上の位相変調量を得ることができます。出荷時には、タイプごとに特定の波長範囲に合わせて高精度・高線形変調特性が得られるように調整されています。図1は位相変調特性の代表例です。2π以上の位相変調量が高い線形性をもって得られていることがわかります。また位相変調特性については、有効面内の95 %の画素における位相変調が±2σの範囲に収まっており、バラツキが小さいことを確認しています。
[図1] 位相変調性 (代表例)
高い回折効率
最適な光学設計により光損失を最小限に抑えることで、理論値に近い回折効率を得られます。図2は多値位相格子を表示した際に得られる回折スポット像です。多値位相格子を利用することにより、例えば図2(c)に示すように+1次のみに回折スポットを集中させることが可能となるため、高い光利用効率を得ることができます。また、図3に回折効率の代表的な例を示します。ここでの回折効率は、変調を行わない場合（パターンなし）の0次光強度に対する1次回折光強度の比です。
[図2] 回折スポット像
[図3] 回折効率 (代表例)
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