当社独自のMEMS (Micro-Electro-Mechanical Systems)技術を応用した電磁駆動式のミラーです。ミラーの下に磁石を配置することで小型化し、気密封止パッケージの採用により高信頼性を実現しています。ミラー周辺のコイルに電流を流すと、フレミングの法則によってローレンツ力が発生し、ミラーを駆動します。当社のMEMSミラーは、広い光学的振れ角、高いミラー反射率も実現しています。
低速軸: ±12 °
|駆動周波数 (max.)||高速軸: 29.3 kHz (typ.)
低速軸: 100 Hz
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