新製品の C14273は、既存の2タイプよりも長い波長帯に感度をもったタイプで、感度波長範囲は、1.75～2.15 μmです。
MEMS-FPI分光センサは、印加電圧により透過波長を可変できるMEMS-FPIチューナブルフィルタとInGaAs PINフォトダイオードを 一体化した超小型の分光センサで、近赤外域の分光測光が可能です。
薬品、食品、繊維などの製造・検査において、分光計測を用いて既知 (本物)の成分とそうでないものを迅速に見分けたい、あるいは プロセス管理のために水分量の変化をモニタしたい、というニーズがあります。 このようなニーズを解決するためには、赤外に感度をもつ分光計測器で堅牢・小型・低コストのものが必要となります。 MEMS-FPI分光センサはこれらの要求を満たしたソリューションです。
Fabry-Perot Interferometer: ファブリペロー干渉計
|感度波長範囲||1.35 ～ 1.65||1.55 ～ 1.85||1.75 ～ 2.15||μm|
MEMS-FPI分光センサは、MEMS-FPIチューナブルフィルタ、受光素子 (フォトダイオード)などから成ります。光入射方向と同軸上に MEMS-FPIチューナブルフィルタと受光素子を配置するシンプルな構成です。分光センサでありながら、単素子の受光素子を使用 しており、高価な多チャンネルの受光素子を使用していません。
MEMS-FPIチューナブルフィルタは、エアギャップを介して、上部ミラーと下部ミラーを対向させています。ミラー間に電圧を印加し、その静電引力によってエアギャップの調整を行います。そのため、上部ミラーはメンブレン (薄膜)構造となっています。エアギャップがmλ/2のときに、おおむね波長 λが透過するフィルタとして機能します。フィルタ制御電圧を大きくすると静電引力によりエアギャップは小さくなり、透過ピーク波長が短波長側へシフトします。
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