近年の自動車は電子制御される機器の割合が増加し、多くの光半導体素子が搭載されています。搭載される素子には高い信頼性とゼロディフェクト (不良ゼロ)が求められ、その実現のためには故障メカニズムの解明による”壊れない光半導体素子を作る取り組み”が必要です。
浜松ホトニクスでは、車載用の光半導体素子の製造とともに半導体故障解析装置の製造も行っているため、自社の装置を素子の品質向上に活用できる体制があります。光半導体素子の製造を行う固体事業部では、品質検証や故障解析のためにシステム事業部の半導体故障解析装置を用い、システム事業部では半導体素子設計者の生の声となる固体事業部からのフィードバックやニーズを取り入れ、半導体故障解析装置の改良を行っています。このように社内でフィードバックサイクルを回し、製品の品質向上に努めています。
固体事業部で製造している一部の車載用光半導体素子は、車載用電子部品信頼性の標準であるAEC (Automotive Electronics Council)に基づき信頼性試験を行っています。また、素子が壊れるまで試験を実施し、限界調査とその後の解析*も行っています。
製品量産時には、以下のような検査・検証を行っています。
・自動外観検査 (ウエハ/パッケージレベル)
・ウエハプロービング (高温/低温)
・PAT (Part Average Testing)
・SPC、歩留まりモニタリング、不良品解析*
* システム事業部のエミッション顕微鏡によるIR-OBIRCH/発光/発熱解析
システム事業部で製造・販売している半導体故障解析装置は、社内の半導体設計者の生の声を吸い上げ、開発・改良を行っています。新規開発の装置に社内の光半導体素子を用いることで、早期の実験・検証が可能となっています。
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