弊社は、多彩な故障解析手法を行うことが可能なエミッション顕微鏡 PHEMOS-Xや倒立型エミッション解析装置 iPHEMOS-MPXをラインアップしています。目的に応じた検出器を選択することで、発光解析や発熱解析、IR-OBIRCH解析などの様々な解析手法に対応することができます。レーザスキャンシステムで高解像度なパターン像を取得し、パターン像に検出した信号像を重ね合わせて表示することで、ミクロレベルで検出箇所を特定することができます。半導体メーカーでは、この信号検出位置をもとに不良因子を特定し、物理解析などを行うことで故障原因を解明して、設計にフィードバックすることになります。
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