Japan (JA)
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PHEMOS-X エミッション顕微鏡
C15765-01
多波長レーザ搭載により、可視光から近赤外光まで一台で対応可能に。
PHEMOS-Xは半導体デバイスの故障に起因する発光・発熱などをとらえて故障箇所を特定する高解像度エミッション顕微鏡です。
特長
超高感度カメラを２台搭載可能
発光解析と発熱解析、または可視光と近赤外光といった異なる検出波長域をカバーすることで、サンプルや不良モードに合わせた解析技術を選択できます。
OBIRCH、DALS、EOP、レーザマーカ用の光源を最大7個まで搭載可能
様々なサンプルへの対応が可能な光学ステージを搭載
光学ステージの可動範囲
| X | ±20 mm |
|---|---|
| Y | ±20 mm |
| Z | +80 mm |
※ 使用するプローバおよびサンプルステージとの干渉、NanoLensの追加によりこの値より小さくなることがあります。
基本表示機能
スーパーインポーズ・コントラストエンハンスメント機能
※ソフトウエアのバージョンやお使いの環境等により、実際の画面とは異なる場合があります。
スーパーインポーズ機能により、高解像度のパターン像に検出した信号像を重ね合わせて表示し、容易に不良箇所を特定することができます。
また、コントラストエンハンスメント機能により、低コントラスト像を明確な画像に改善することが可能です。
表示機能
- アノテーション
コメント、矢印、その他の表示を画像上の任意の位置に表示します。 - スケール表示
画像上にスケール幅を線分で表示します。 - グリッド表示
画像上に縦横方向に等間隔のグリッド線を表示します。 - サムネイル表示
サムネイル化した画像を蓄積保存することができ、また元の画像に再生することが可能です。 - マルチ画面表示
6画面にパターン像、発光像、スーパーインポーズ像および参照画像を一度に表示できます。
LSIテスタとの接続例
半導体デバイスの複雑化に伴って、測定するサンプルの初期化や特定状態の設定において、LSIテスタとの接続の要求が高まっています。専用のプローブカードアダプタをエミッション顕微鏡システムに搭載して、LSIテスタとケーブル接続することにより、発光解析およびIR-OBIRCH解析を行います。
仕様
| 外形寸法/質量 | 本体：1656 mm（W）×2000 mm（H）×1247 mm（D）、約1640 kg 制御デスク*1：1000 mm (W) × 700 mm (H) × 800 mm (D) 、約39.2 kg (C16216-01 オペレーションデスク) / 1480 mm (W) × 700 mm (H) × 800 mm (D)、約48.6 kg (C16216-02 オペレーションデスク) |
|---|---|
| 電源 | 単相 AC200 V ～ AC240 V |
| 消費電力 | 約3300 VA |
| 真空源 | 80 kPa以上 |
| 圧縮空気*2 | 0.6 MPa～0.7 MPa |
*1：オプション
*2：レギュレータは本体付属
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