TD Imagingはロジック半導体など複雑な構造をもつ半導体の欠陥の特定に適した技術です。内部に金属製のパーツが含まれている半導体の欠陥も、ピンポイントに検出することができます。
S/Nを38倍向上。浜松ホトニクスはレーザーを用いたThermoReflectanceの特許を所有しており、発熱解析の分野でリードし続けています。
670 nmの光源は、1300 nmと比較して、銅やアルミニウムのような金属上でS/Nを4倍向上させます。
柔軟なスキャン速度、サイズ、統合性を持ち、90秒でデータ取得が可能で、LITよりも高いS/Nを提供します。
EFA(Electrical Failure Analysis:電気的故障解析)の工程において、LIT技術で広範囲の信号を検出した後、TD Imaging(ThermoDynamic Imaging)で信号を2 μmに絞り込み、画像処理を行うことでPFA(Physical Failure Analysis:物理的故障解析)の解析精度が高まります。これにより、欠陥箇所の特定精度がより正確になり解析の効率も向上します。
Dual PHEMOS-Xは、半導体のウェーハやダイの状態で、両面(表面及び裏面)からの故障解析が求められる先端3次元デバイスにおいて、各種解析が可能な高解像度エミッション顕微鏡です。
iPHEMOS-MPXは半導体デバイスの故障に起因する発光・発熱などをとらえて故障箇所を特定する高解像度倒立型エミッション顕微鏡です。
PHEMOS-Xは半導体デバイスの故障に起因する発光・発熱などをとらえて故障箇所を特定する高解像度エミッション顕微鏡です。パワーデバイスから先端デバイス解析まで広く対応します。
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