電子線(Electron Beam、通称「EB」)は、高エネルギーの電子を加速して物質に照射する放射線の一種です。真空チャンバー内の金属フィラメントを加熱することで電子が放出され、それを電圧で加速させて人工的にビーム状にすることで、対象物に照射できるようになります。電子線を照射すると材料の中で2次電子が発生し、イオン化・励起反応・化学結合解離(ラジカル生成)などの化学反応が起こります。
電子線は対象物に照射することで物質の中で2次電子が発生し、イオン化・励起反応・化学結合解離といった化学反応を起こす性質を持っています。その性質を応用して対象物の表面を処理・加工する技術として、ものづくり分野にて応用されています。
添加剤やコーティング剤を使用することなく、材料や部品の機能性を高める処理
反応開始材(化学物質)を使用することなくインキの乾燥やコーティング剤、接着剤を硬化
化学薬品を使用することなく対象物の表面に付着する微生物を減菌
樹脂部材やフィルム材料などの表面の構造体を改質することで特殊な部材に加工
電子線はエネルギー量を制御することで、対象物(基材)の深さ方向への照射深度を調整することができます。エネルギーが低いほど深度は浅く、対象物の内部へのダメージを抑えながら表層の改質を行うことができます。エネルギーが高いほど深度は深く、対象物への高い改質効果を期待できますが、対象物にダメージを与えるリスクが高まります。
エネルギー量は光源選定時の重要な要素になりますが、「エネルギー付与効率」も非常に重要な要素になります。エネルギー付与効率が高ければ高いほど、照射したエネルギーが無駄なく利用できることになります。低エネルギーな電子線源でもエネルギー付与効率が高ければ、線量は抑えつつ表面処理・加工が可能なため、対象物へのダメージを抑えつつ高品質な表面加工・処理を行うことが期待できます。リスク回避と高品質な処理の両方を実現するにはエネルギー付与効率に着目することも重要です。
電子線は放射光の一種なので電子線を使った装置には被ばく防止のために製造ラインにX線遮へい設備も設置する必要があります。エネルギーが低いほど被ばく線量は低く、製造ラインの設備は簡易化できます。エネルギーが高いほど被ばく線量は高く、被ばく線量に応じたX線の遮蔽設備の導入が求められます。またX線遮へい設備の規模の違いは製造ラインのイニシャルコストや製造時に必要な電力の違いによるランニングコストにも影響があります。
低エネルギー且つ高いエネルギー効率を実現する光源を製造ラインに組み込むことで、遮蔽設備を簡易化でき、消費電力やランニングコストの削減を期待できます。
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