浜松ホトニクスでは、電子線照射プロセスの最適化を支援するために、3次元モンテカルロ法を用いたシミュレーションサポートを提供しています。加速電圧・管電流・照射距離などの条件に応じた線量分布を高精度で計算します。このサービスにより、実験前に最適な照射条件を科学的に予測し、開発期間の短縮やコスト削減を実現できます。「どの条件でどのような効果が得られるか」を事前に把握することで、試行錯誤を最小限に抑え、効率的なプロセス設計が可能になります。
当社のシミュレーションでは、以下のような検討が可能です。シミュレーション結果は、実測値と±5~15%の範囲で一致することが確認されています。
電子線が材料の深さ方向にどの程度エネルギーを与えるかを予測できます。
これにより、改質したい層に最適な加速電圧・照射距離を算出可能です。
加速電圧・距離が決まれば、単位時間で付与できる線量を予測し、必要な管電流や搬送速度を算出できます。これにより、生産プロセスへの導入可否を事前に検討可能です。
電子線が材料の深さ方向にどの程度エネルギーを与えるかを予測できます。これにより、改質したい層に最適な加速電圧・照射距離を算出可能です。
基材へのダメージや影響を実照射の前に把握し、過剰なダメージを防ぎます。
電子線照射による樹脂上のコーティング乾燥(EBキュアリング)を対象にシミュレーションを行った事例です。この事例での要望は「コーティング層にのみエネルギーを集中させ、基材へのダメージを避けたい」というものでした。シミュレーションの結果、加速電圧を60 kV以下に設定することで基材への影響を抑制できることが判明しました。一方で、吸収線量は80~100 kVで設定した場合に比べて約半分になることも確認できたため、乾燥時間と基材への影響を両立する条件の最適化を効率的に検討することができました。このように、シミュレーションを活用することで、試行錯誤を繰り返すことなく、短期間で科学的根拠に基づいた最適条件を導き出すことが可能です。
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