Optical NanoGauge 膜厚計
Ｃ13027は、分光干渉法を利用した非接触の膜厚測定装置です。シーケンサ接続や膜厚と色の同時計測機能に加え、装置組み込みを容易にするために、従来製品に比べ小型化を実現しました。Optical Gaugeシリーズでは最 も薄い10 nmの極薄膜測定に対応することができます。また、10 nm～100 μmと幅広い膜厚測定範囲の対象に適応します。さらに、最速200 Hzの高速測定も可能なため、高速ラインでの測定にも対応することができます。
|測定膜厚範囲 （ガラス）||10 nm～100 μm*1|
|測定再現性 （ガラス）||0.02 nm*2 *3|
|測定精度 （ガラス）||±0.4 ％*3 *4|
|測定波長範囲||400 nm～1100 nm|
|電源||AC100 V～AC240 V、50 Hz/60 Hz|
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