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HyperGauge 面内膜厚計
C17319-11
300 mm ウェーハの膜厚を５秒で計測
HyperGauge 面内膜厚計 C17319-11 は、分光干渉法を採用した膜厚測定装置です。分光器を用いず、高感度カメラで波長シフトを検出する技術「λ-Capture®」を搭載し、 最大300 mmウェーハの全面膜厚をわずか5 秒で一括測定することができます。
λ-Captureは、浜松ホトニクス株式会社の登録商標です。
面内膜厚分布をスナップショット
HyperGauge 面内膜厚計 C17319-11 は、ポイントセンサ方式と比較して、圧倒的なスピードで膜厚分布を取得します。 また、高分解能と高い測定再現性を兼ね備えており、ベアウェーハはもちろん、パターンウェーハの検査にも対応できる精度を実現しています。
膜厚分布を５秒で取得
高感度カメラを用いた独自の波長検出技術「λ-Capture」を採用することで、エリア方式による膜厚測定が可能です。最大300 mmウェーハの面内膜厚分布を、わずか５秒で取得します。 さらに、ウェーハ全面を一括で撮像するため、ポイントセンサ方式と比べて、測定箇所の選定や位置合わせを簡単に行うことができます。
面内均一性を測定し、生産性を向上
半導体製造工程では、チャンバ内のピン温度などの影響により、ウェーハ上の膜厚にばらつきが生じることがあります。この膜厚の不均一性は品質に悪影響を及ぼすため、工程間で膜厚を均一化することが重要です。ポイントセンサ方式では、測定時間の制約から測定点数が限られるため、面内膜厚分布の把握には限界がありました。しかし、エリア方式を採用することで、約75 万点の測定点から面内膜厚分布をわずか5 秒で取得することが可能となりました。これにより、プロセス時間の短縮による生産向上や、面内膜厚分布の把握による歩留まり向上が期待できます。半導体製造において、面内均一性の高速測定は、生産性と品質の両立に大きく貢献します。
チャンバによる膜厚の影響イメージ
半導体製造工程での膜厚検査イメージ
測定例
パターンの評価 (膜厚分布プロファイルの比較)
パターン間の膜厚分布を取得し、ポイントセンサ方式を採用しているOptical NanoGauge とエリア方式を採用しているHyperGaugeの膜厚分布プロファイルを比較しました。結果からHyperGaugeはポイントセンサ方式に劣らない精度で膜厚を測定できていることがわかります。
ムラの小さいサンプルの評価サンプル：SiO2 300 nm
ムラの大きいサンプルの評価：SiO2 500 nm
極薄膜評価：SiO2 10 nm
パターンの評価：SiOx2 300 nm
水－ガラス窓越しの測定：SiO2 500 nm
測定原理
HyperGaugeは分光干渉法を採用しています。分光干渉法は、薄膜サンプルからの反射スペクトルを解析し、膜厚を測定する方法です。膜厚に応じて、干渉スペクトルが波長シフトします。
高速に波長を測定する「λ-Capture」テクノロジー
λ-Captureは、分光器を用いず、波長の微妙なシフト量を検出できる独自の波長検出技術です。ウェーハ面全体の分光計測を行う場合、通常の分光器でのポイント計測や、イメージング分光器でのライン計測では膨大な時間がかかります。 λ-Captureは、2台の高感度カメラを用いてエリアでの波長を計測できるため、高速にウェーハ全面の波長シフト計測を行うことができます。
本技術をHyperGaugeに搭載することで、半導体製造におけるプロセスロスの低減や歩留まり向上が期待されます。
仕様
| 型名 | C17319-11 |
|---|---|
| 測定膜厚範囲 | 10 nm ～ 1000 nm |
| 測定精度 (Accuracy) | 膜厚 10 nm ～ 100 nm : 0.1 nm 膜厚 100 nm ～ 1000 nm : ±0.1 ％ |
| 測定再現性 (Precision) | 膜厚 10 nm ～ 100 nm 積算96回 : ±1 nm 膜厚 100 nm ～ 1000 nm 積算96回 : ±1 ％ |
| 安定性 | 温度依存性 環境温度変化 +20℃～ +30℃：±1 ％ 高さ依存性 5 mm高さ移動：±1 ％ 長期安定性 起動から1時間：±0.5％ |
| 視野サイズ | φ300 mm ウェーハ全面 |
| 空間分解能 | 0.3 mm/pixel |
| ワーキングディスタンス | フィールドレンズ下面-サンプル面間距離 : 30 nm ～ 100 mm |
| 解析 | λ-Capture解析 |
| 計測時間 (解析時間含む) ※1 | 5 秒 |
| 外部通信インターフェース | Camera Link、RS232C |
| 電源電圧 | DC 24 V |
| 消費電力 | 約40 W |
*1 計測・解析条件による
外形寸法図
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