一般にキズやゴミ、配線不良などは外観検査で検出することができますが、結晶中のクラックやLEDチップ内部の欠陥は外観検査では十分に検出することができません。
浜松ホトニクスは、PLを利用したイメージングで計測できる「発光波長」や「発光強度」に着目し、これらをパラメータとして利用することで、マイクロLEDの材料である半導体ウェーハの結晶内部の欠陥や不純物を検出する技術を開発しました。 MiNY PLは、高感度な画像で微細な欠陥を鮮明に検出することができます。
外観検査と組み合わせて、PL計測法を用いた内部検査も行うことで、より精緻な検査を行うことができます。
マイクロLEDを使ったディスプレイにおいて、マイクロLEDの発光波長の微妙なばらつきはディスプレイの色合いや明るさに直結するといわれています。2 nmの微細な波長のばらつきも、色ムラとして人の目で認識することができます。均質な色合いや明るさのマイクロLEDを製造するために、発光波長のばらつきを検出することは、非常に重要なパラメータになります。
MiNY PLは、チップごとに発光波長の違いをマッピング画像に変換し、±0.5 nmという高い精度でウェーハ内の発光波長のばらつきを色ムラとして視覚化することができます。これにより、ウェーハの良品判定をより精密かつ効率的に行うことが可能になります。
また、オプションの分光計測モジュールを用いることで、発光スペクトルの計測にも対応します。
MiNY PLのソフトウエアは、外観画像やPL画像を取得し、表示するほか、さまざまなチップデザインに対応した解析、良否判定のガイド機能など、解析の精度を高める性能を備えています。また、計測においては、RGBそれぞれに対応した計測条件の設定が可能です。
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