Japan (JA)
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X線源
X線源とは
X線検査では、図１のように「X線源」よりX線が照射され、検査対象物を通過し「X線検出器」へと入射します。X線が対象物を透過するとき検査対象物に遮られて減衰し、X線の透過率に応じて白黒の濃淡で画像が映し出されます。X線源では、主に真空管の一種であるX線管を使用しX線を発生させています。図２ではX線源におけるX線発生の仕組みを示します。X線管には陽極（プラス）と陰極（マイナス）の電極が組み込まれています。陰極（カソード）と陽極（アノード）に高電圧をかけると、カソードから高速に放出された電子がアノードに衝突し、X線が発生します。
図1 : X線源を使用したX線検査の構成例
図2 : X線源におけるX線発生の仕組み
管電流と管電圧
X線源は、X線管へと流す電流・電圧により、発生するX線の量（強度）や波長（エネルギー）が変化します。
・管電流（A）を上げることでX線の発生量が増え、X線画像の明度が明るくなる
・管電圧（V）を上げることでX線の波長が短くなり、物質を透過しやすくなる
物質によって透過に必要な管電圧（V）は変わるため、対象物に合わせて適切な電圧と電流の条件設定が必要となります。
管電流・出力（X線画像の明度）
管電圧（X線透過性）
マイクロフォーカスX線源
マイクロフォーカスX線源は、ミリフォーカスX線源と比較して焦点寸法（X線光源の大きさのこと）が小さい、マイクロメートルオーダーのX線源です。X線源における焦点寸法は、画像の解像度（分解能）に直結します。X線焦点寸法が大きいほど、高幾何学倍率撮影時の半影による輪郭ボケも大きくなり、X線焦点寸法が小さいほど、輪郭ボケの小さい高精細なX線画像が得られます。
マイクロフォーカスX線源は、高幾何学倍率時でもボケの少ない高精細なX線画像の取得が可能です。
焦点寸法の違いにおける特長比較
密封型マイクロフォーカスX線源
密封型は、本体が小型で装置への組み込みが容易なマイクロフォーカスX線源です。X線源発生部分が真空管に封止された設計であるため、お客様によるメンテナンスは不要です。一方で、X線管は使い切りとなるため、劣化と共にメーカーでの交換作業が必要となります。
開放型マイクロフォーカスX線源
開放型は、付帯設備が必要となりますが、密封型では成しえない高管電圧・高分解能な特性を有しています。また、カソード・アノード交換など消耗部品を定期的に交換することで、長期間継続使用が可能です。そのため、ダウンタイム（装置停止時間）の低減に貢献します。
関連製品
軟X線源
X線の中でも波長が長く、エネルギーの低い軟X線を発生するX線源です。小型・軽量であり、鉛を使わず樹脂板でX線の遮蔽が可能なため、硬X線よりも手軽に導入しやすいメリットがあります。透過性や精度は硬X線源より劣りますが、硬X線源ではエネルギーが強くX線が透過しすぎてしまう検査対象物や、小型かつ軟物質を小規模で検査する場合では、軟X線検査が特に有効です。
関連製品
その他の製品
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試写のご案内
浜松ホトニクスは、試写を通じて非破壊検査における最適なソリューションを提案します。
浜松ホトニクスでは、お客様からの非破壊検査のご要望に対する事前評価として、各種X線源やセンサ、カメラによる試写を行っております。弊社は非破壊検査装置メーカーではないため、特定のメーカーの装置に偏らず最適な光源、検出器などの面からデバイス・装置の選定をお手伝いいたします。
また、最適なデバイスの紹介だけでなく、長年のビジネスで培った経験をもとに、撮影のコツやノウハウも含めた最適なソリューションを提案いたします。お気軽にお問い合わせください。
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