950 nm~1700 nmの近赤外波長領域に高い感度を持つInGaAs(インジウム・ガリウム・ヒ素)センサを搭載したカメラです。近赤外検出器は装置が小さく、被ばくなどのリスクもないため、導入がしやすい検出器です。その波長特性から、生鮮食品の痛み検査および異物検査、パッケージされた容器の液量検査、Siウェーハの内部検査などに適しています。目視では確認が難しい内部の様子を近赤外を使って非破壊で可視化することで、食品や製品を傷つけることなく不良品の発見が可能です。
りんごの傷み検査
サンプル : りんご
撮像波長 : 1450 nm
照明方法 : 反射
使用カメラ : InGaAsラインスキャンカメラ C15333-10E
Siウェーハの内部パターン観察
サンプル : Siウェーハ
撮像波長 : 1100 nm
照明方法 : 透過
使用カメラ : InGaAsラインスキャンカメラ C15333-10E
一般的にシリコンを用いて作られるCCDセンサやCMOSセンサなどは、近赤外領域の感度が非常に低く、1100 nm以上の波長には感度がありません。そのため、近赤外検出器にはInGaAsセンサが使用されます。InGaAsセンサは、InP(インジウム・リン)基板上に、In(インジウム)、Ga(ガリウム)、As(ヒ素)を結晶化成長させダイオードを形成することで、近赤外波長領域における高い感度を実現しています。
InGaAsセンサの仕組み
近赤外領域の感度を有した二次元のInGaAsカメラです。Siウェーハ / デバイスの内部検査をはじめ、レーザビームの位置合わせ、太陽電池の評価等幅広い用途でご利用いただけます。
リアルタイムでのインライン非破壊検査に対応した一次元のInGaAsカメラです。パッケージ内の液量・容量検査、入味検査、農産物のキズ・異物検査といったコンベアなどで搬送される対象物の検査や、半導体デバイスの高解像度検査、太陽電池等半導体材料の欠陥検査に適しています。
可視(VIS)、近赤外(NIR)、短波赤外(SWIR)域をカバーするInGaAsイメージセンサです。分光器、分光測定、科学計測カメラ、マシンビジョンをはじめとした産業用イメージングなど、さまざまな用途に対応しています。浜松ホトニクスでは、センサだけでなく、ユーザ側での設計期間を短縮するための駆動モジュールや評価用ボードも提供しています。また、特定のアプリケーションや仕様に応じてカスタマイズも可能です。
浜松ホトニクスでは、お客様からの非破壊検査のご要望に対する事前評価として、各種X線源やセンサ、カメラによる試写を行っております。弊社は非破壊検査装置メーカーではないため、特定のメーカーの装置に偏らず最適な光源、検出器などの面からデバイス・装置の選定をお手伝いいたします。
また、最適なデバイスの紹介だけでなく、長年のビジネスで培った経験をもとに、撮影のコツやノウハウも含めた最適なソリューションを提案いたします。お気軽にお問い合わせください。
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