FTIR (Fourier Transform Infrared Spectroscopy: フーリエ変換赤外線分光法)は、赤外分光分析法の一種です。
試料 (固体/液体/気体)に赤外光を照射し、その透過光または反射光を干渉計により干渉させ、その信号強度をフーリエ変換することでスペクトル情報を取得します。
得られたスペクトル情報から物質の定性、定量、同定が可能なため、FTIRを用いた分析装置や分光光度計は、医療・化学分析・環境分析・材料分析などの幅広い分野で利用されています。
扱う赤外光の波長域によって、FT-NIR (近赤外光)やFT-IR (中赤外光)と区別することもあります。
波長 (μm) | FT-NIR | FT-IR | |||
---|---|---|---|---|---|
1 | 2 | 5 | 10 | 15 | |
分光器 |
(1.1 ~ 2.5 μm) |
||||
赤外線センサ |
(1 ~ 2.5 μm) |
||||
(1 ~ 3.8 μm) |
|||||
(1 ~ 5.5 μm) |
|||||
(1 ~ 11. μm) |
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(1 ~ 14.5 μm) |
FTIRエンジン (FT-NIR分光器)は、マイケルソン光干渉計や制御回路を手のひらサイズの筐体にまとめた、小型のフーリエ変換型赤外分光モジュールです。
独自のMEMS技術・実装技術を光干渉計部分に応用することで、フーリエ変換型の特長をそのままに小型化を実現しました。
小型化に伴う入射光量の減少を解消するために、光干渉計内部のアクチュエータを構成する可動ミラーを独自のMEMS技術で開発し、反射光を効率よく利用できるように改良しました。また、可動ミラーと固定ミラーをMEMSチップとして一体化することでコンパクト化するとともに、ミラー間の相対角度の誤差を100分の1度程度まで低減。さらに、MEMSアクチュエータの構造と駆動方法を最適化し、駆動時のぶれを無くすことで、光干渉計内部での赤外光の広がりを抑え、損失を低減しています。これらにより、従来の据置型に匹敵する検出性能を実現しました。
測定対象光 (入射光)をビームスプリッタで分割し、それぞれ可動ミラーと固定ミラーで反射して再び合成すると、光干渉が生じます。この可動ミラーの位置によって変化する干渉光強度を光検出器 (InGaAs PINフォトダイオード)で検出し、その信号を演算処理 (フーリエ変換)することで分光スペクトルを取得します。また、光検出器 (Si PINフォトダイオード)と半導体レーザ (VCSEL)を用いて同一干渉計内で可動ミラーの位置を測定することで、波長再現性の高い分光スペクトルが得られます。
1.1 μm ~ 2.5 μmの近赤外域には、多くの物質が固有の吸収スペクトルをもつため、さまざまな分野の赤外分光分析に利用されています。
FTIRエンジンを利用した赤外分光分析は、反射測定と透過測定の2種類の方法があります。
FTIRに使用される中赤外受光素子には、RoHS指令によって規制される物質を含む素子が多く使われているため、代替製品の開発が求められていました。
14.5 μmまで検出できる化合物半導体素子として、当社は世界で初めてRoHS指令の制限物質 (水銀・カドミウム)を使用せずにType II 超格子赤外線検出素子の量産化に成功しました。
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