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FAQs | 厚み/膜厚計測装置
測定に適した材料、測定できない材料について教えてください。
光を通す材料であれば、基本的に測定可能です。
100 nm以上の金属膜など光を通さないサンプルの測定は困難です。（50 nm以下の測定は実績あり）また、光が散乱しやすいサンプルも測定が困難です。
ヘイズ率等の詳細スペックについては、弊社までご相談ください。
どのような用途に使用されていますか？
半導体、FPD、フィルムなどの製造工程の検査（膜厚管理）を主として、インライン・オフラインで採用されています。
測定可否の確認のため、デモ測定を行いたいのですが可能でしょうか？
お客様のサンプルを用いたデモ測定に対応しています。
Optical Gaugeシリーズのデモ機を用意いたしますので、弊社までご相談ください。
Optical Gaugeの厚み測定結果の確認は、どのように実施していますか？
弊社では、第3者機関が厚みを保証するサンプルを測定し、その基準値と測定結果を判断し厚み確認を行っています。
なお、申し訳ございませんが、弊社で値の確認ができないサンプルにつきましては、保証は致しかねます。
どのくらいの精度で測定が可能でしょうか？
絶対精度には、材料の光学定数（屈折率と吸収係数）が関わってきます。
この光学定数が正しければ、絶対厚の精度が高まります。弊社では、第3者機関であるVLSI Standardsの測定保証書記載の保証範囲を測定精度としています。また、再現性に関しては、石英ガラス400 nmのサンプルで標準偏差が0.02 nmとなります。
高さ変動に強いとありますが、どのくらいでしょうか？
数mmの変動に対応することが可能です。
詳細は、厚み/膜厚測定の課題のページのデフォーカス依存性をご覧ください。
納品後の相談・連絡はどのような内容が多いですか？
ハードウエアの修理相談は比較的少なく、ソフトウエアを含めた解析部分、特にレシピ設定についての相談が多いです。
この点に関しましては、簡易レシピ設定の機能があり、お客様でも設定することが可能です。
自動測定は可能でしょうか？
Optical Gaugeシリーズの製品は、外部通信機能により自動測定に対応しています。C15151-01、C13027では、電気的な入力・出力信号による測定制御が可能ですので、シーケンサ接続も容易に行えます。
サンプルとセンサの距離を長くした測定は可能でしょうか？
通常測定では、サンプルとセンサの距離は10 mm以下となりますが、35 mmのワーキングディスタンスに対応した光学系も準備しています。
デモ測定のご案内
浜松ホトニクスでは、厚み/膜厚計測装置を用いたデモ測定を行っております。弊社内のデモルームにて、専門エンジニアと共に、国内外のお客様との共同研究やサンプルをお預かりしての実験、購入前の実機検討などに幅広くご利用いただけます。
また、最適な製品の紹介だけでなく、長年のビジネスで培った経験をもとに、測定のコツやノウハウも含めた最適なソリューションを提案いたします。お気軽にお問い合わせください。
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