厚み/膜厚計とは、物体そのものの厚みや、物体表面に形成された薄膜の厚さを高精度で測定する専用の計測装置です。弊社ではナノメートルオーダの薄膜測定を対象にしたOptical NanoGaugeとマイクロメートルからミリメートルオーダでの厚み測定を対象にしたOptical MicroGaugeの2つのシリーズを用意しています。
浜松ホトニクスは厚み/膜厚計を用いて、半導体デバイスの製造過程における成膜モニタ、ウェーハ厚み管理のためのソリューションを提供しています。
厚み/膜厚の測定には以下のような測定手法が存在します。
浜松ホトニクスは光を利用した分光干渉式、レーザ干渉式の測定方式に強みを持っており、対象物の厚さや材質に応じた様々な厚み/膜厚計をラインアップしています。
薄膜サンプルに白色光を入射すると、膜内部で多重反射が起こります。この多重反射光は、互いの位相差に応じて強めあったり弱めあったりします。各多重反射光の位相差は、光の波長と光路長(=薄膜内で光が往復する距離×膜の屈折率)によって決まります。このため、サンプルからの反射または透過スペクトルは、膜厚に依存した特有のスペクトルを示します。分光干渉法は、このスペクトルを解析することにより膜厚を測定する方法です。分光干渉式膜厚測定装置では、カーブフィッティング法とFFT(高速フーリエ変換)をアプリケーションにより使い分けて解析することができます。
厚みがあると、山谷の数が増加します。また、横軸を波長とした場合は、短波長側の間隔は長波長側の間隔よりも短くなります。
プローブヘッドから照射された近赤外光は、まずウェーハ表面で反射されます。光の一部は、ウェーハを透過し反対側の界面で反射します。各反射光がコントローラ内部で信号処理され、反射が生じた位置、すなわちウェーハ界面が検出されます。これらのピーク間距離から、ウェーハの厚みを算出します。
金属製のパターンは透過せず、ウェーハの厚みを計測
ウェーハを透過し、各ウェーハの厚みを計測
浜松ホトニクスでは、厚み/膜厚計測装置を用いたデモ測定を行っております。弊社内のデモルームにて、専門エンジニアと共に、国内外のお客様との共同研究やサンプルをお預かりしての実験、購入前の実機検討などに幅広くご利用いただけます。
また、最適な製品の紹介だけでなく、長年のビジネスで培った経験をもとに、測定のコツやノウハウも含めた最適なソリューションを提案いたします。お気軽にお問い合わせください。
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