SEMICONDUCTOR APPLICATION LAB.(静岡県浜松市 常光製作所内)は、お客様との共創を目的とした実験室です。弊社の専門エンジニアと共に、国内外のお客様との共同研究やサンプルをお預かりしての実験、購入前の実機検討などに幅広くご利用いただけます。また、実施後にお客様の検査・解析環境整備、検査・解析の最適条件・レシピの提案などもいたします。施設にお越しいただいてのご利用だけでなく、ビデオ通話でのリモート実験なども承ります。
※お使いのブラウザや設定によって正しく表示されない場合がございます。
SEMICONDUCTOR APPLICATION LAB.は、弊社製品をご利用いただいているお客様だけではなく、購入をご検討いただく方々にもご利用いただけます。
「購入検討のために装置を使ってみたい」「納品前に装置の操作方法を習得したい」「ユーザーとして応用的な使い方を知りたい」といった装置を使う場として、また「半導体の品質を高めるための課題解決をしたい」「新たな解析技術を探るための意見交換をする機会がほしい」といった半導体企業同士のコミュニケーションする場として、 様々な利用ケースに対応しています。
Optical NanoGauge 膜厚計 C15151-01は、分光干渉法を利用した非接触の膜厚測定装置です。高出力で高安定な白色光源を採用したことにより、超極薄膜の膜厚測定を可能にしました。
C13027は、分光干渉法を利用した非接触の膜厚測定装置です。シーケンサ接続が可能なうえ、装置組み込みを容易にするために、従来製品に比べ小型化を実現しました
C11011シリーズは、レーザ干渉法を利用した厚み測定装置です。60 Hzの高速測定が可能で、生産現場でのインライン測定にも対応します。
各種Optical Gaugeシリーズと組み合わせることにより、ウェーハやフィルムの厚み分布測定を行うマッピングシステムです。エッチング・グラインディング特性の面内均一性確認や品質管理にご利用いただけます。
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