厚み/膜厚計測装置の導入においては、複雑なシステム設計、煩雑な設置・メンテナンス作業などの課題があります。これらの課題は生産効率の低下やコスト増加につながりかねません。
これらの課題を解決する方法として、角度依存性やデフォーカス依存性が低い計測機器を使用するという方法があります。浜松ホトニクスは、厚み/膜厚計測装置の角度依存性やデフォーカス依存性を低く抑えることで、システム設計の簡素化、設置・メンテナンス作業の軽減に寄与しています。
本ページでは、標準的な厚み/膜厚計測装置と浜松ホトニクス製品の厚み/膜厚計測装置について、角度依存性やデフォーカス依存性の違いについて紹介します。
角度依存性とは、膜厚計測において測定対象の表面に対する入射光の角度変化が測定結果に与える影響のことを指します。入射角が変わると、光の反射や透過の特性が変化し、得られる信号強度や位相情報が変わる可能性があります。これにより、同じ膜厚でも異なる測定結果になってしまう場合があります。
浜松ホトニクスの厚み/膜厚計はこの角度依存性が低いため、多少の角度のズレでは測定結果に影響を与えにくいというメリットがあります。
図1:角度の違いによる測定への影響イメージ図
デフォーカス依存性とは、光学系のフォーカス状態が膜厚測定結果に与える影響のことを指します。測定対象の表面が光学系の焦点面からずれると、得られる画像や信号のコントラストや解像度が低下し、測定精度に影響を与える可能性があります。特に、微細な構造や薄い膜を測定する場合、デフォーカスの影響は顕著になります。
浜松ホトニクスの厚み/膜厚計は、レンズを用いた集光光学系を用いていないため、標準的な膜厚測定器と比較して、高さ方向のズレによる測定結果の変動が少ないというメリットがあります。
図2:デフォーカスよる測定への影響イメージ図
浜松ホトニクスでは、厚み/膜厚計測装置を用いたデモ測定を行っております。弊社内のデモルームにて、専門エンジニアと共に、国内外のお客様との共同研究やサンプルをお預かりしての実験、購入前の実機検討などに幅広くご利用いただけます。
また、最適な製品の紹介だけでなく、長年のビジネスで培った経験をもとに、測定のコツやノウハウも含めた最適なソリューションを提案いたします。お気軽にお問い合わせください。
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