Multipoint NanoGauge 膜厚計
|測定膜厚範囲 （ガラス）||20 nm～100 μm*2|
|測定再現性 （ガラス）||0.02 nm*3 *4|
|測定精度 （ガラス）||±0.4 ％*4 *5|
|測定波長範囲||320 nm～1000 nm|
|電源||AC100 V～AC240 V、50 Hz/60 Hz|
|消費電力||2ch時：約350 VA、 15ch時：約500 VA|
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