Japan (JA)
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Optical NanoGauge 膜厚計
C12562-03
| 型名 | C12562-03 |
|---|---|
| 測定膜厚範囲 （ガラス） | 500 nm～300 μm*1 |
| 測定再現性 （ガラス） | 0.02 nm*2 *3 |
| 測定精度 （ガラス） | ±0.4 ％*3 *4 |
| 光源 | ハロゲン光源 |
| スポットサイズ | 約φ1 mm*3 |
| ワーキングディスタンス | 10 mm*3 |
| 測定可能層数 | 最大10層 |
| 解析 | FFT解析、フィッティング解析、光学定数解析 |
| 計測時間 | 3 ms/point*5 |
| ライトガイドコネクタ形状 | FC |
| 外部通信機能 | RS-232C、Ethernet |
| 電源 | AC100 V～AC240 V、50 Hz/60 Hz |
| 消費電力 | 約80 VA |
*2 400 nm厚さのガラス膜測定時の標準偏差。
*3 使用する光学系または対物レンズの倍率による。
*4 VLSI Standards 測定保証書記載の測定保証範囲。
*5 最短露光時間。
外形寸法図
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