超高真空中で結晶の構成元素をそれぞれ別々のルツボから蒸発させ分子線にして供給し、昇温させた基板結晶上に薄膜結晶をエピタキシャル成長させる技術。
複数の入力パルスの高さをヒストグラムとして表示する機器。
微細加工技術で作ったマイクロアクチュエータ、マイクロメカニズム、マイクロセンサなどと電子回路を集積化するシステム。
常温・常圧で固体あるいは液状の有機金属原料をガス化して供給し、昇温させた基板結晶上で熱分解・化学反応させて、その上に薄膜結晶をエピタキシャル成長させる技術。
MEMS技術を用いた光学システム。光MEMSとも呼ばれます。
主に欧州車に採用されている車載ネットワークの規格の1つ。POFを用いたリング構造のネットワークで、ノード間の通信速度は25 Mbpsおよび150 Mbpsです。車載以外にも、空港内インターフォン用ネットワークなどで用いられています。
CCDの電極を構成するMOS構造のゲート下のすべてのCCDチャンネルを反転状態にして動作させる方法。反転動作とも呼ばれ、酸化膜シリコン界面での熱励起電子の発生が極端に抑制されるため、暗電流の少ない状態が実現できます。
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